Supported Products

PRODUCTS

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List of repairs handled
Inventory list of new and used machines
Manufacturer list

LAM

Chamber Parts

  • 0200-10562

  • ASSY, SYM DOOR,MAA, 2300

    • 839-045710-807

  • BLK,FLOW,SIM CANTLVR,MAA,2300???

    • 714-045709-002

  • CHMBR,TOP PC, 2300 MTL/PLY????

    • 715-027638-814

  • CHMBR,TOP PC,HT CHOKE,MULTI ZO??

    • 715-027638-822

  • LINER,CANTILVR,OUTR LNR MNT,23??

    • 714-045744-008

  • LINER,FIXED OUTR,MAA,ACME,2300??

    • 714-045743-809

  • LINER,SYM, HI FLOW, 2300,SRC???

    • 715-042721-858

  • LINER,UPPER 300MM-Z AXIS W/CU???

    • 715-801021-838

  • PLT,GAS DIST,300MM,W/GRV HTR-A??

    • 715-801916-808

Chiller

  • DEX-40AZ
  • Alliance
  • CHｼﾘｰｽﾞ
  • EX-2004

Equipement Parts

  • 853-012123-001 ASSY ARM DRIVE
  • 853-031776-001 PADDLE LIFT ASSY
  • 853-012123-00X LAM Harmonic Arm Driver Assy｜150MM/200MM
  • 853-032776-002 Lam TCP-9600 Paddle Lift｜150MM
  • 853-012200-00X LAM Inner Gate Assy｜150MM/200MM
  • 853-013542-002 LAM 4xxx ISO Valve｜150MM/200MM
  • 853-013521-001 LAM 4xxx ISO Valve｜150MM/200MM
  • 853-360073-001 LAM 9400 Turbo Bypass Valve｜150MM/200MM
  • 853-032983-001 LAM 9400 Turbo ISO Valve｜150MM/200MM
  • 853-032123-002 LAM ISO Valve｜ DSQ Chamber｜150MM/200MM

ESC

  • LAM ESC FLEX ESC

    • 839-019090-324
    • 839-800327-315
    • 839-019090-328
    • 839-800327-385

  • LAM ESC Kiyo 45 ESC

    • 839-019090-608

  • LAM ESC KIYO ESC

    • 832-038915-201

  • LAM ESC Kiyo-CX ESC

    • 839-019090-611

Generator

  • FULLY REFURBISHED

    • LRC Match 853-032190-008
    • TCP Upper match 853-031685-001
    • DSQ Match 853-025735-008
    • Lam T Match 853-032294-002-E-ELM
    • Lam 490 RF Match Lam 490 RF Match
    • LAM 9500 Match + Controller 353-250118-001
    • Lam Mini Match 853-025083-001 REV N
    • Lam Research Match LAM AS1Q
    • Lo Fat Match 853-25907-0015

  • Matching Box

    • 853-330951-021-B-262C

Motor Driver

  • USAREM－A5DTE12

  • SMC Heat Exchanger

    • INR-244-647C

Valve

  • SLIT VALVE

    • ACT-SLIT VALVE

Robot

  • 853-012123-004-2-DFT
  • 853-012123-004-2-LL FDR

Are you looking for a "genuine product"?

TMH can also supply generic parts and improved parts (CIP).
We also handle manufacturers and models not listed.
Please contact us for more information.

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About LAYLA, an online marketplace for the semiconductor industry

LAYLA

“LAYLA” is a marketplace for the global semiconductor industry operated by TMH.
You can become a buyer and/or a seller through "LAYLA" and trade.
If you are looking for a product, please search on "LAYLA" as well.

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