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AMAT

Bellows

  • 0040-85643
  • 0040-87358
  • 0040-97780
  • 0040-47803
  • 0040-36986
  • 0040-38625
  • 0040-39066
  • 0040-39372
  • 0040-39569
  • 0040-39946
  • 0040-43404
  • 0040-44713
  • 0040-48186
  • 0040-49386
  • 0040-62667
  • 0040-62981
  • 0040-70181
  • 0040-70291
  • 0040-72248
  • 0040-73310
  • 0040-75296
  • 0040-75904
  • 0040-76498
  • 0040-76767
  • 0040-80830
  • 0040-81988
  • 0040-84650
  • 0040-87018
  • 0040-87019
  • 0040-87020
  • 0040-88004
  • 0040-96829
  • 0041-04435
  • 0041-11186
  • 0040-20283
  • 0040-20418
  • 0040-21302
  • 0040-21402
  • 0040-22581
  • 0040-22740
  • 0040-31844
  • 0040-31998
  • 0040-32052
  • 0040-32053
  • 0040-32133
  • 0040-32204
  • 0040-33562
  • 0040-35554
  • 0040-35909
  • 0040-36033
  • 0040-36095
  • 0040-36290
  • 0040-36299
  • 0040-36300
  • 0015-09055
  • 0015-09055S
  • 0015-09056
  • 0020-22910
  • 0040-01362
  • 0040-05790
  • 0040-05797
  • 0040-06361
  • 0040-08156
  • 0040-08232
  • 0040-08393
  • 0040-09004
  • 0040-09193
  • 0040-09649
  • 0040-09697
  • 0040-09700
  • 0040-09944
  • 0040-13730
  • 0040-62987
  • 0040-18078
  • 0040-20068
  • 0040-20146
  • 0040-20155
  • 0040-20194

Ceramic Heater

  • 0190-01167
  • 0190-00397
  • 0190-01168
  • 0190-35986
  • 0190-05406
  • 3M87-036569-11
  • 0190-05807
  • 0190-01894
  • 0190-36078
  • 0010-31581
  • 0190-35615
  • 0010-33992
  • 0040-08529
  • 0040-34698
  • 0040-54449
  • 0040-60524
  • 0040-83188
  • 0040-88097
  • 0040-96583
  • 0041-04679
  • 0041-08919
  • 0041-49879
  • 31LS-100A
  • ESD80-002282-11
  • PAA68245
  • 0040-53976
  • 0040-82041
  • 0040-82421
  • 0040-84051
  • 0040-84715
  • 0040-85475
  • 0040-85725
  • 0040-89894
  • 0041-01652
  • 0041-10493
  • 0190-05083
  • 0010-45448
  • 0041-33896
  • 0010-14007
  • 0010-14700
  • 0010-24367
  • 0010-26264
  • 0010-29443
  • 0010-30987
  • 0010-31987
  • 0010-53618
  • 0010-04461
  • 0010-06598
  • 0010-07042
  • 0010-08265
  • 0010-08605
  • 0010-11681
  • 0010-11908
  • 0010-23014
  • 0010-23794
  • 0010-24189
  • 0010-24299
  • 0010-24300
  • 0010-24685
  • 0010-25416
  • 0010-28081
  • 0010-29128
  • 0010-30838
  • 0010-31708
  • 0010-31709
  • 0010-31724
  • 0010-31871
  • 0010-34715
  • 0010-36734
  • 0040-04048
  • 0040-07024
  • 0040-07031
  • 0040-07033
  • 0040-42270
  • 0040-44585
  • 0040-49020
  • PAA97325
  • PAZ01521F0
  • 0010-31879
  • 0010-36736
  • 0010-08621
  • 0010-12118
  • 0010-31396
  • 0010-44753
  • 0040-42451
  • 0041-04789
  • 0041-32489
  • 0010-07938
  • 0010-08167
  • 0010-12813
  • 0010-13459
  • 0010-16893
  • 0040-40635
  • 0195-01037
  • 0195-01314
  • 0040-02408
  • 0040-02538
  • 0040-36383
  • 0040-38097
  • 0040-40508
  • 0040-61269
  • 0040-70479
  • 0190-03516
  • 0010-06825
  • 0040-02450
  • 0040-42700
  • 0010-04421
  • 0010-04483
  • 0010-10252
  • 0040-08621
  • 0040-08803
  • 0040-46818
  • 0010-01933
  • 0010-36631
  • 0040-02149
  • 0040-32712
  • 0010-03843
  • 0040-00939
  • 0040-36219
  • 0040-37010
  • 0040-40699
  • 0010-02342
  • 0010-02461
  • 0010-02467

  • 300mm AMAT Dual Zone Ceramic Heater

    • 0195-02970

  • 300mm AMAT Producer Cer. Heater

    • 0010-48841

  • 300mm AMAT Producer DZ Heater

    • 0041-32919

Chamber Parts

  • 0040-87958-004
  • 0200-10555
  • 0020-33806
  • 0200-39296
  • 0200-35956
  • 0021-09550
  • 0020-09552
  • 0200-10377
  • 0021-01421
  • 0200-00137
  • 0200-10324
  • 0021-09552
  • 0040-92487

  • DOOR SLIT VALVE Y2O3 COAT 300MM DPS232

    • 0020-89739

  • LINER CATHODE Y203 W/SCREEN DPSⅡ

    • 0020-87845

  • LINER LOWER Y2O3 COAT DPSII

    • 0020-87876

  • LINER UPPER THICK Y2O3 COATING 300MM DPS

    • 0040-37642

  • NOZZLE INSERT DG Y203 300MM DPS2

    • 0200-06250

  • PLASMA SCREEN Y2O3 COATED 300MM DPSII

    • 0020-87791

Chiller

  • Quantum Heat Exchanger
  • STEELHEAD
  • Endura Chiller
  • INR-498-012D
  • HX-150
  • AMAT-0
  • HX-300
  • AMAT-1

Equipement Parts

  • 0190-09769 MAGNETRON HEAD DPS 200mm
  • 0190-09939 OMS BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-13065 VGA BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-13175 LIGHT PEN All 200mm
  • 0190-35650 SERIPLEX CONTROL BUS ASSY BD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-70060 W MAGNET DRIVER ASSY P5001/Super E /MXP/DPS 200mm
  • 0190-76005 OMS BOARD (P/N:0190-76005) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0660-00221 THERMALOGIC BOARD REPAIR TS:30028349 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 3750-01106 SMART MATCHING ASSY DPS 200mm
  • 9700-4282-01 INDEXER CONTROL BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • BLD424-5 BRUSHLESS DC MOTOR DRIVER FOR ENDURA P/N:1080-01190 Endura 200mm
  • N/A CENTURA LOADLOCK INDEXER OVERHAUL All 200mm
  • N/A DETECTOR｜EDP MONOCHROMATOR(CENTURA) DPS 200mm
  • N/A CENTURA｜ MAGNET DRIVER(AMAT) DPS 200mm
  • N/A Bearing ASSY P5000/Super E /MXP/DPS 200mm
  • N/A ACTR RTRY 180DEG 50MMBORE W/AUTO SW & Super E 200mm
  • 0010-39867 SUPER E HV MODULE(HVMODULE ASSY POSITIVE CESC) Super E 200mm
  • 0020-21699 ORIENTER LASER TUBE ASSY All 200mm
  • 0090-00224 I/O EXPANSION CARD P/N:0090-00224 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-03467 0090-03467｜ SYNERGY V452 SBC For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-76110 SBC BOARD TS:30003408 (0090-76110) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-76133 SBC BOARD TS:30029760 (P/N:0090-76133) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-90967 DAQ TYPE H PW SUPPLY FOR QUANTUM For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-91938 Arc Control DSP BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00011 CHOPPER DRIVER BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00223 PCB WH I/F MBC AMPLIFIER For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00396 PCB ASSY ANALOG INPUT/OUTPUT(0100-00396)(Centura) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00426 INTERLOACK BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00782 PCB ASSY ALNALOG INPUT For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00957 STEEPER CONTROL BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01130 CCD BOARD REPAIR (30000896R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01894 AO BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01996 ASSY PCB SEISEI BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-02735 VGA BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09009 BUFFER I/O BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09054 A I/O BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09172 EIGHT CHANNEL EMISSION/LASER ENDPOINT BD DPS 200mm
  • 0100-09196 ESC CONTROL BOARD(P/N:0100-38032 ) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09204 H2O VDSII CONTROLLER BOARD TS :30003433 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09222 CHAMBER INTERFACE BD FOR DPS CENTURA P/N:0100-09222 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09389 TC AMP INTERLOCK BOARD REPAIR (WxZ red bin) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-11002 DI / DO BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20001 SEI BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20007 Pneumatuc distribution board repair For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20068 CCD BOARD (30074095R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20068 PCB ASSY CCD (30074095R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20084 CENTURA｜0100-20084 MFC INTERCONNECT BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35054 CENTURA｜0100-35054 CHAMBER INTERCONNECT BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35054 CHAMBER INTERFACE BD P/N:0100-35054 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35173 SERIIPLEX POWER DISTRIBUTION BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35185 LAMP FAILURE LED BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-76124 PCB DIGITAL I/O (DI/O BOARD) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-76259 WAFER ORIENTER PCB BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-99011 GAS INTERLOCK BOARD FOR QUANTUM For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-09379 WPCB ASSY｜ VME CPU SYNERGY UPGRADE(P/N:0190-09379) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-09688 CENTURA｜ SERIPLEX BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0010-06264 THROTTLE VALVE LOWER DPS 200mm
  • 0010-09933 DPS HV MODULE DPS 200mm
  • 0010-09968 THROTTLE VALVE UPPER Super E 200mm
  • 0010-10556 DETECTOR｜EDP MONOCHROMATOR (P-5000) P5000 200mm
  • 0010-10901 MXP HV MODULE(ESC) DPS 200mm
  • 0010-10973 0010-10973 ESC POWER SUPPLY All 200mm
  • 0010-10973 HOT PACK P/N:0010-10973 Super E/MXP 200mm
  • 0010-13124 5 PHASE DRIVER DPS 200mm
  • 0010-20021 SLIT VALVE TS:30073629 DPS 200mm

ESC

  • AMAT ESC 300mm AMAT ESC Assy

    • 0041-26722
    • 0041-26723
    • 0040-81673
    • 0040-53718
    • 0040-81674
    • 0010-33416
    • 0041-06414
    • 0041-07781

  • DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)

    • 0010-06788
    • 0010-30277
    • 0190-23942

  • E-MAX ESC 200mm E-Max Ceramic ESC Assy

    • 0040-40979
    • 0040-40981
    • 0040-70250
    • 0040-05493

  • E-MAX ESC 200mm E-Max Ceramic ESC Assy (Epsilon)

    • 0010-05994
    • 0010-05995
    • 0010-06229
    • 0040-00876
    • 0040-04951
    • 0040-05370
    • 0040-40978
    • 0040-40980
    • 0040-43558
    • 0040-44645

  • E-MAX ESC 300mm E-Max Ceramic ESC Assy

    • 0040-49504
    • 0040-49519

  • ESC

    • 0010-06875 200mm MCA Puck ESC Pink Color Endura
    • 0010-34561 200mm MCA Puck ESC Pink Color Endura
    • 0200-06584 201mm MCA Puck ESC Pink Color Endura
    • 0200-76086 202mm MCA Puck ESC Pink Color Endura
    • 0200-76086 203mm MCA Puck ESC Pink Color Endura
    • 15-270165-00 300mm Novellus Inova Double Gap Semco ESC

  • HEATER

    • 0190-03501 200mm Producer Certura Heater
    • 0190-03516 215mm DxZ Ceramic Heater
    • 0190-05083 300mm Producer Cer. Heater
    • 0190-21581 200mmm MCA Heater
    • 0190-21597 200mmm MCA Heater
    • 0190-21758 200mmm MCA Heater
    • 0190-21764 200mmm MCA Heater
    • 0200-200MC 200mm Producer Certura Heater
    • 0200-35527 200mm Producer Certura Heater
    • 0200-37359 200mm Producer Certura Heater
    • PAA63395 200mm Producer Certura Heater
    • 0010-33992
    • 0010-36734 300mm Producer Cer. Heater
    • 0010-36736 300mm Producer Cer. Heater
    • 0010-36738 300mm Producer Cer. Heater
    • 0010-36740 300mm Producer Cer. Heater
    • 0020-23478 200mmm MCA Heater
    • 0040-02408 204mm DxZ Ceramic Heater
    • 0040-02450 205mm DxZ Ceramic Heater
    • 0040-02539 206mm DxZ Ceramic Heater
    • 0040-04048 300mm Producer Cer. Heater
    • 0040-07024 300mm Producer Cer. Heater
    • 0040-07033 300mm Producer Cer. Heater
    • 0040-07953 200mm Dual Zone Ceramic Heater
    • 0040-33788 200mm Dual Zone Ceramic Heater
    • 0040-36383 207mm DxZ Ceramic Heater
    • 0040-37010 208mm DxZ Ceramic Heater
    • 0040-37593 209mm DxZ Ceramic Heater
    • 0040-38097 210mm DxZ Ceramic Heater
    • 0040-40508 211mm DxZ Ceramic Heater
    • 0040-42700 212mm DxZ Ceramic Heater
    • 0040-44585 300mm Producer Cer. Heater
    • 0040-45008 200mm Producer Certura Heater
    • 0040-47318 200mm Producer Certura Heater
    • 0040-49020 300mm Producer Cer. Heater
    • 0040-51612 200mm Producer Certura Heater
    • 0040-53976 300mm Producer Cer. Heater
    • 0040-61269 200mm Producer Certura Heater
    • 0040-61269 213mm DxZ Ceramic Heater
    • 0040-70479 200mm Producer Certura Heater
    • 0040-70479 214mm DxZ Ceramic Heater
    • 0040-82421 300mm Producer Cer. Heater
    • 0040-84051 300mm Producer Cer. Heater
    • 0040-85475 300mm Producer Cer. Heater
    • 0040-86263 200mm Producer Certura Heater
    • 0040-88188 300mm V7 Vaccum Purge Ceramic Heater
    • 0040-MF612 200mm Producer Certura Heater
    • 0041-01652 300mm Producer Cer. Heater
    • 0041-04679 300mm V7 Vaccum Purge Ceramic Heater
    • 0041-08919 300mm V7 Vaccum Purge Ceramic Heater
    • 0190-00381 200mmm MCA Heater
    • 0010-23068 300mmm MCA Heater
    • 0010-23794 300mm Producer Cer. Heater
    • 0010-24189 300mm Producer Cer. Heater
    • 0010-24300 300mm Producer Cer. Heater
    • 0010-24367 300mm V7 Vaccum Purge Ceramic Heater
    • 0010-24685 300mm Producer Cer. Heater
    • 0010-25323 200mm Producer Certura Heater
    • 0010-25415 200mm Producer Certura Heater
    • 0010-25416 300mm Producer Cer. Heater
    • 0010-27430 300mmm MCA Heater
    • 0010-28081 300mm Producer Cer. Heater
    • 0010-29128 300mm Producer Cer. Heater
    • 0010-29675 200mm Producer Certura Heater
    • 0010-30838 300mm Producer Cer. Heater
    • 0010-31708 300mm Producer Cer. Heater
    • 0010-31709 300mm Producer Cer. Heater
    • 0010-31724 300mm Producer Cer. Heater
    • 0010-31871 300mm Producer Cer. Heater
    • 0010-31879 300mm Producer Cer. Heater
    • 0010-31987 300mm V7 Vaccum Purge Ceramic Heater
    • 0010-01166 200mmm MCA Heater
    • 0010-01286 200mmm MCA Heater
    • 0010-01625 200mmm MCA Heater
    • 0010-01925 200mmm MCA Heater
    • 0010-02342 200mm DxZ Ceramic Heater
    • 0010-02461 201mm DxZ Ceramic Heater
    • 0010-02467 202mm DxZ Ceramic Heater
    • 0010-03030 200mmm MCA Heater
    • 0010-03254 200mmm MCA Heater
    • 0010-03287 200mm Producer Certura Heater
    • 0010-03840 200mm Producer Certura Heater
    • 0010-03841 200mm Producer Certura Heater
    • 0010-04448 200mmm MCA Heater
    • 0010-04450 200mmm MCA Heater
    • 0010-04978 300mm Producer Cer. Heater
    • 0010-05030 200mm Dual Zone Ceramic Heater
    • 0010-06205 200mmm MCA Heater
    • 0010-06825 203mm DxZ Ceramic Heater
    • 0010-07815 300mmm MCA Heater
    • 0010-08265 300mm Producer Cer. Heater
    • 0010-08605 300mm Producer Cer. Heater
    • 0010-08901 200mm Producer Certura Heater
    • 0010-11681 300mm Producer Cer. Heater
    • 0010-11908 300mm Producer Cer. Heater
    • 0010-12282 200mm Producer Certura Heater
    • 0010-12814 200mm Dual Zone Ceramic Heater
    • 0010-13314 200mmm MCA Heater
    • 0010-13895 200mmm MCA Heater
    • 0010-15961 200mmm MCA Heater
    • 0010-17871 200mm Producer Certura Heater
    • 0010-21839 200mmm MCA Heater
    • 0010-21840 200mmm MCA Heater
    • 0010-22134 300mmm MCA Heater
    • 0010-22166 200mmm MCA Heater
    • 0010-22180 200mmm MCA Heater
    • 0010-22184 300mmm MCA Heater
    • 0010-22186 200mmm MCA Heater
    • 0010-22988 300mmm MCA Heater
    • 0010-23014 300mm Producer Cer. Heater
    • 0010-23066 300mmm MCA Heater

  • MCA ESC 200mm AMAT MCA E-Chuck Assy(J)

    • 0010-04451
    • 0190-00382
    • 0190-21442
    • 0190-21443
    • 0190-21759
    • 0190-22094

  • MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)

    • 0010-04452
    • 0010-13313
    • 0010-13897
    • 0010-21836
    • 0010-21946
    • 0010-22167
    • 0010-22408
    • 0010-22411
    • 0010-01196
    • 0010-01288
    • 0010-01926
    • 0010-03028
    • 0010-03361

  • MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)

    • 0010-08017
    • 0010-08750
    • 0010-12516
    • 0010-17812
    • 0010-17831

  • MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)

    • 0010-04448
    • 0010-04450
    • 0010-01166
    • 0010-01167

  • MCA ESC 300mm AMAT MCA E-Chuck Assy

    • 0010-29710
    • 0020-08825
    • 0021-22182
    • 0040-23068
    • 0040-23680
    • 0040-48399
    • 0040-70754
    • 0010-20746
    • 0010-22183

  • MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)

    • 0010-22134
    • 0010-22184
    • 0010-22985
    • 0010-22988
    • 0010-23066
    • 0010-23068
    • 0010-27430

  • MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)

    • 0010-16109
    • 0010-16858
    • 0010-16986
    • 0010-17111
    • 0010-19971
    • 0010-23677
    • 0010-23803
    • 0010-24076
    • 0010-24456
    • 0010-07815
    • 0010-14204

  • MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)

    • 0010-27431
    • 0010-27983
    • 0010-24356
    • 0010-24358
    • 0010-03773
    • 0010-03774
    • 0010-06874
    • 0010-11343
    • 0010-15431

  • MCA ESC 300mm Endura Puck Assy, DTESC

    • 0200-02936

  • MCA ESC 300mmm AMAT MCA E-Chuck Assy

    • 0010-54667

  • ULTIMA ESC 12" HDP Ultima ESC

    • 0040-48594

  • ULTIMA ESC 300mm Dual HE HDPCVD ESC

    • 0040-33215

  • ULTIMA ESC 300MM DUAL HE, HDPCVD.

    • 0040-02987

  • ULTIMA ESC 8" HDP Ultima ESC

    • 0040-18219
    • 0040-18208

Generator

  • DC POWER SUPPLY

    • 0190-01895
    • 0190-13866
    • 0190-14155
    • 0190-16309
    • 0190-16430
    • 0190-18391
    • 0190-19810
    • 0190-19811
    • 0190-21855
    • 0190-36275
    • 1090-14211
    • 1090-14212

  • HV MODULE ESC

    • 0010-04926
    • 0010-10901
    • 0010-11239

  • MICROWAVE

    • 0190-09264
    • 0190-09769
    • 0196-09264

  • RF GENERATOR

    • 0190-09845
    • 0190-13306
    • 0190-13320
    • 0190-14206
    • 0190-14992
    • 0190-15399
    • 0190-26767
    • 0190-36308
    • 0190-36686
    • 0190-70080
    • 0190-76028
    • 0190-76030
    • 0190-76048
    • 0920-00060
    • 0920-01006
    • 0920-01019
    • 0920-01047
    • 0920-01061
    • 0940-01048
    • 0090-09025
    • 0090-75013
    • 0090-76013
    • 0190-00210
    • 0190-01873
    • 0190-01896
    • 0190-02702
    • 0190-06988
    • 0190-06989
    • 0190-09832
    • 0190-09834
    • 0190-09841
    • 0190-09843

  • RF MATCHER

    • 0010-36941
    • 0010-37209
    • 0010-37220
    • 0010-39207
    • 01-82889-00
    • 0190-01371
    • 0190-06234-002
    • 1110-01057
    • 1110-01063
    • 0010-25893
    • 0010-26029
    • 0010-26180
    • 0010-28719
    • 0010-28722
    • 0010-29196
    • 0010-29210
    • 0010-30094R
    • 0010-30236
    • 0010-30263
    • 0010-30686K
    • 0010-30686R
    • 0010-30687
    • 0010-31529
    • 0010-32148
    • 0010-33724
    • 0010-33746
    • 0010-36114
    • 0010-36162R
    • 0010-36408R
    • 0010-09750R
    • 0010-10579
    • 0010-11468
    • 0010-11479
    • 0010-12088
    • 0010-12090
    • 0010-12112
    • 0010-12456
    • 0010-13524
    • 0010-13524(SIDE PLUS)
    • 0010-13602
    • 0010-13622
    • 0010-13623
    • 0010-13627
    • 0010-13878
    • 0010-14841
    • 0010-15877
    • 0010-15878
    • 0010-17337
    • 0010-17437
    • 0010-18129
    • 0010-18129(TOP PLUS)
    • 0010-18130
    • 0010-18229(TOP)
    • 0010-18230(SIDE)
    • 0010-19529
    • 0010-20524
    • 0010-20524R
    • 0010-20525
    • 0010-20855
    • 0010-21748
    • 0010-22161
    • 0010-22225
    • 0010-22498
    • 0010-23172(TOP-X)
    • 0010-23173(SIDE-X)
    • 0010-23684
    • 0010-23685
    • 0010-24385
    • 0010-24386
    • 0010-00854R
    • 0010-01776
    • 0010-01929
    • 0010-02113
    • 0010-02372
    • 0010-02849
    • 0010-02850
    • 0010-02977
    • 0010-02979
    • 0010-04138R
    • 0010-05846
    • 0010-06018
    • 0010-07437
    • 0010-09007
    • 0010-09416R
    • 0010-09417
    • 0010-09490

  • RF SUPPLY

    • 0190-36274
    • 0190-36343

Jacket Heater

  • Piping heater LI-9496 Balzers Valve Assy.

    • 0190-23500

  • Piping heater LI-9497 Balzers Valve Assy.

    • 0190-23502

  • Piping heater LI-9498 Balzers Valve Assy.

    • 0190-23503

  • Piping heater LI-9499 Balzers Valve Assy.

    • 0190-33740

  • Silicone rubber heater

    • 0190-23502 / Weld Ment TEE-KF40
    • 0195-00218 / WCSH-0240-0000

MAGNET

  • 0020-01997
  • 0020-01998
  • 0020-01999
  • 0020-02800
  • 0020-20157
  • 0020-20159
  • 0020-20297
  • 0020-20298
  • 0020-20299
  • 0020-20300
  • 0020-21386
  • 0020-22150
  • 0020-22152
  • 0020-22153
  • 0020-22373
  • 0020-22674
  • 0020-22675
  • 0020-22676
  • 0020-23559
  • 0020-24562
  • 0020-28491
  • 0020-54900
  • 0021-04527
  • 0021-08475
  • 0021-08478
  • 0021-08480
  • 0021-11382
  • 0021-13957
  • 0021-13959
  • 0021-20199
  • 0021-28993
  • 0021-53959
  • 0040-20100
  • 0040-20129
  • 0040-22651
  • 0040-22710
  • 0040-23053
  • 0040-23345
  • 0010-21810
  • 0010-21819
  • 0010-21844
  • 0010-21940
  • 0010-22043
  • 0010-23819
  • 0010-23840
  • 0010-25739
  • 0010-26439
  • 0010-26441
  • 0010-26442
  • 0010-26451
  • 0010-27417
  • 0010-30631
  • 0010-31177
  • 0010-33883
  • 0010-76693
  • 0020-01075
  • 0020-01995
  • 0020-01996
  • 0010-01231
  • 0010-01994
  • 0010-03485
  • 0010-03486
  • 0010-03487
  • 0010-03488
  • 0010-04065
  • 0010-04753
  • 0010-04941
  • 0010-06748
  • 0010-07563
  • 0010-09394
  • 0010-11228
  • 0010-12447
  • 0010-12530
  • 0010-12582
  • 0010-12864
  • 0010-14875
  • 0010-14916
  • 0010-20221
  • 0010-20222
  • 0010-20223
  • 0010-20224
  • 0010-20225
  • 0010-20258
  • 0010-20328
  • 0010-20389
  • 0010-20768
  • 0010-20806
  • 0010-20818
  • 0010-20819
  • 0010-20860
  • 0010-21020
  • 0010-21097
  • 0010-21127
  • 0010-21403
  • 0010-21465
  • 0010-21668
  • 0010-21676
  • 0010-21788
  • 0010-01198
  • 0041-01138

  • 200mm AMAT Magnet Assy

    • 0010-47599

PARTS

  • NEW(OEM&2ND)

    • 3870-04338 PRODUCER SLIT VALVE
    • N/A ASSY｜ LMEP2 SMART COMM｜ BOSCH(9700-8533-02)
    • 1410-01543 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CH/A/B/C 11 200MM SPLIT IVL PRODUCER(TT10-01 w/TPM10)
    • 1410-01758 HEATER JACKET｜ FILTER/VALVE｜ ZONE 3｜ CHAMBER A/B/C｜ 3｜ 200MM PRODUCER
    • 3420-01068 INSUL PALL FILTER SILICONE RUBBER FOAM(FC-D980C O2 100sccm)
    • 1410-01361 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 3 200MM PRODUCER
    • 1410-01362 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 4 200MM PRODUCER(NQ430L2C)
    • 1410-01363 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 5 200MM PRODUCER(3130-F120-P7T1-W12QB7-10A)
    • 1410-01364 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 6 200MM PRODUCER
    • 1410-01368 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 10 200MM PRODUCER
    • 1410-01369 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 11 200MM PRODUCER
    • 1410-01444 HTR JKT 30 MIL B LAYER UPPER ZONE 1 CHAMBER C ITEM 3 200MM SPLIT PRODUCER
    • 1410-01448 HTR JKT 30 MIL B LAYER UPPER ZONE 1 CHAMBER C ITEM 5 200MM SPLIT PRODUCER
    • 1410-01459 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C ITEM 1 200MM SPLIT PRODUCER
    • 1410-01461 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C 2 200MM SPLIT PRODUCER
    • 1410-01463 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C 3 200MM SPLIT PRODUCER
    • 1410-01465 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C ITEM 4 200 MM SPLIT PRODUCER
    • 1410-01467 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C 5 200 MM SPLIT PRODUCER
    • 1410-01472 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C ITEM 6 200 MM SPLIT PRODUCER
    • 1410-01480 HTR JKT 30 MIL B LAYER UPPER ZONE 2 CHAMBER C ITEM 8 200 MM SPLIT PRODUCER
    • 1410-01507 HTR JKT 30 MIL B LAYER LOWER/BYPASS ZONE 4 ITEM 4 SACVD PRODUCER SE
    • 1410-01534 Heater Jacket 30 MIL B.Layer PLIS USG Zone 5 Item 8 SACVD Producer
    • 1410-01535 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CHAMBER A/B/C 1 200MM SPLIT IVL PRODUCER
    • 1410-01536 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CH.A
    • 1410-00705 HEATER JACKET｜ UPPER｜ ZONE 1｜ CHAMBER C｜ 1｜ 200MM SPLIT IVL PRODUCER
    • 1410-00706 HEATER JACKET｜ UPPER ZONE 1｜ CH. C｜ 2｜ 200MM SPLIT IVL PRODUCER
    • 1410-00707 HEATER JACKET｜ UPPER ZONE 1｜ CH. C｜ 3｜ 200MM SPLIT IVL PRODUCER
    • 1410-00708 HEATER JACKET｜ UPPER ZONE 1｜ CH.C｜ 4｜ 200MM SPLIT IVL PRODUCER
    • 1410-00709 HEATER JACKET｜ UPPER ZONE 1｜ CH. C｜ 5｜ 200MM SPLIT IVL PRODUCER
    • 1410-00710 HEATER JACKET｜ UPPER ZONE 1｜ CH. C｜ 6｜ 200MM SPLIT IVL PRODUCER
    • 1410-00711 HEATER JACKET｜ UPPER ZONE 1｜ CH.C｜ 7｜ 200MM SPLIT IVL PRODUCER
    • 1410-00712 HEATER JACKET｜ UPPER｜ ZONE 2｜ CHAMBER C｜ 1｜ 200MM SPLIT IVL PRODUCER
    • 1410-00715 HEATER JACKET｜ UPPER ZONE 2｜ CH. C｜ 4｜ 200MM SPLIT IVL PRODUCER(3P 240V 20A)
    • 1410-00716 HEATER JACKET｜ UPPER ZONE 2｜ CH. C｜ 5｜ 200MM SPLIT IVL PRODUCER
    • 1410-00717 HEATER JACKET｜ UPPER ZONE 2｜ CH.C｜ 6｜ 200MM SPLIT IVL PRODUCER
    • 1410-00718 HEATER JACKET｜ UPPER ZONE 2｜ CH. C｜ 7｜ 200MM SPLIT IVL PRODUCER
    • 1410-00719 HEATER JACKET｜ UPPER ZONE 2｜ CH. C｜ 8｜ 200MM SPLIT IVL PRODUCER(W23X1A1G-10)
    • 1410-00720 HEATER JACKET｜ UPPER ZONE 2｜ CH. C｜ 9｜ 200MM SPLIT IVL PRODUCER(W23X1A1G-7.5)
    • 1410-00761 HEATER JACKET｜ UPPER ZONE 3｜ CH.A/B/C｜ ITEM 5｜ 200
    • 1410-00801 HTR JKT｜ SQR ISO VALVE 85C｜ PRODUCER 200MM(W23X1A1G-15)
    • 1410-00920 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH. A/B/C 1 200MM SPLIT IVL PRODUCER(3P 240V 20A)
    • 1410-00921 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 2 200MM SPLIT IVL PRODUCER
    • 1410-00922 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 3 200MM SPLIT IVL PRODUCER
    • 1410-00923 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 7 200MM SPLIT IVL PRODUCER
    • 1410-00924 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 8 200MM SPLIT IVL PRODUCER
    • 1410-00925 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 9 200MM SPLIT IVL PRODUCER(2P 240V 15A)
    • 1410-00926 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 10 200MM SPLIT IVL PRODUCER(1P 240V 20A)
    • 1410-00927 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 11 200MM SPLIT IVL PRODUCER
    • 1410-00928 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C 12 200MM SPLIT IVL PRODUCER(1P 240V 30A)
    • 1410-00929 HTR JKT 30 MIL B LAYER UPPER ZONE 3 CH.A/B/C ITEM 13 200MM SPLIT IVL PRODUCER(2P 240V 30A)
    • 1410-00930 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CH.A/B/C
    • 1410-00931 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CH.A/B/C 3 200MM SPLIT IVL PRODUCER(3P 240V 40A)
    • 1410-00932 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CH. A/B/C 6 200MM SPLIT IVL PRODUCER(1P 240V 15A)
    • 1410-00933 HEATER JACKET｜ 30 MIL B. LAYER｜ UPPER ZONE 4｜ CHAMBER A/B/C｜ 8｜ 200MM SPLIT IVL PRODUCER
    • 1410-00934 HTR JKT 30 MIL B LAYER UPPER ZONE 4 CHAMBER A/B/C 12 200MM SPLIT IVL PRODUCER
    • 1410-00972 HEATER JACKET｜ 30 MIL B.LAYER｜ PLIS BPSG｜ ZONE 5｜ 7｜ SACVD PRODUCER SE
    • 1410-00974 HTR JKT 30 MIL B LAYER PLIS BPSG ZONE 5 11 SACVD PRODUCER SE
    • 1410-01337 HEATER JACKET 30 MIL B LAYER FILTER/VALVE ZONE 3 CHAMBER A/B/C 1 200MM PRODUCER
    • 1410-01338 HEATER JACKET 30 MIL B LAYER FILTER/VALVE ZONE 3 CHAMBER A/B/C 2 200MM PRODUCER
    • 1410-01339 HEATER JACKET 30 MIL B LAYER FILTER/VALVE ZONE 3 CHAMBER A/B/C ITEM 4 200MM PRODUCER(2P 240V 15A)
    • 1410-01340 HEATER JACKET 30 MIL B LAYER FILTER/VALVE ZONE 3 CHAMBER A/B/C 5 200MM PRODUCER
    • 1410-01341 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C ITEM 1 200MM PRODUCER
    • 1410-01342 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C 2 200MM PRODUCER
    • 1410-00592 HEATER JACKET｜ UPPER｜ ZONE 1｜ 4｜ SACVD PRODUCER SE
    • 1410-00596 HEATER JACKET｜ LOWER/BYPASS｜ ZONE 4｜ 3｜ SACVD PRODUCER SE
    • 1410-00609 HEATER JACKET｜ FINAL VALVES/MNFLD BPSG｜ ZONE 3｜ 7｜ SACVD PRODUCER SE
    • 1410-00611 HEATER JACKET｜ FINAL VALVES/MNFLD BPSG｜ ZONE 3｜ 9｜ SACVD PRODUCER SE
    • 1410-00616 HEATER JACKET｜ FINAL VALVES/MNFLD BPSG｜ ZONE 3｜ 14｜ SACVD PRODUCER SE
    • 1410-00625 HEATER JACKET｜ PLIS BPSG｜ ZONE 5｜ 9｜ SACVD PRODUCER SE
    • 1410-00659 HEATER JACKET｜ UPPER ZONE 3｜ CH.A/B/C｜ 4｜ 200MM SPLIT IVL PRODUCER
    • 1410-00661 HEATER JACKET｜ UPPER ZONE 3｜ CH.A/B/C｜ 6｜ 200MM SPLIT IVL PRODUCER
    • 1410-00673 HEATER JACKET｜ UPPER ZONE 4｜ CH.A/B/C｜ ITEM 5｜ 200MM SPLIT IVL PRODUCER
    • 1410-00675 HEATER JACKET｜ UPPER ZONE 4｜ CH/A/B/C｜ 7｜ 200MM SPLIT IVL PRODUCER
    • 1410-00677 HEATER JACKET｜ UPPER ZONE 4｜ CH.A/B/C｜ ITEM 9｜ 200MM SPLIT IVL PRODUCER
    • 1410-00678 Heater jacket｜ Upper Zone 4｜ CH/A/B/C
    • 0242-21935 PRODUCER CHAMBER SHIPPING CLAMP KIT
    • 0242-24370 KIT SHIPPING CLAMPS｜ PRODUCER INDEXER SMIF
    • 0242-39150 LOCKOUT KIT 1:2｜ PRODUCER｜ PDD
    • 0242-87049 KIT｜ EMO CBL｜QDP80 PUMPS｜ PRODUCER
    • 0270-09348 TOOL｜ LIFT-PIN REMOVAL｜ MOD II｜ RTP
    • 0270-09350 TOOL｜ TOP｜ SUPPORT BASE｜ WINDOW｜ RTP
    • 0500-00109 FLOWPOINT ANALOG 4-VALVE CONTROLLER｜ EPI(53-146300-002)
    • 0200-35065 CHAMBER LINER｜QTZ｜ LOWER
    • 0200-35362 INSERT｜SILICON｜CH REFLECTOR｜RTP CHAMBER
    • 0200-36119 RING EDGE .17 200 MM W/FLAT SI BATCH COA
    • 0200-36373 LIFT PIN｜ .149 DIA TRIANGULAR
    • 0200-01393 LINER｜ COMMON｜ BD/BLOK｜ LOWK｜ 200MM PRODUCER
    • 0200-02518 CERAMIC PIN｜ LOADLOCK TRAY｜ 200/300MM PRODUCER
    • 0200-04092 CERAMIC LINER｜ TOP｜ APF 200MM PRODUCER
    • 0200-00289 CYLINDER WAFER SUPPORT 200MM RTP QUARTZ
    • 0200-00316 Isolator pumping ring middle 200mm Producer
    • 0200-00402 ISOLATOR PUMPING RING TOP 200MM PRODUCER
    • 0190-09807 SPEC｜ CH AC PALLET｜ RTP SIN TPCC 200MM AC MODULE
    • 0190-13132 HOSE ASSY FACTY SUPLY/HEATER/LAMP IN CH
    • 0190-13133 HOSE ASSY HEATER/LAMP OUT/FACTY RET CH C
    • 0190-13520 HOSE ASSY｜CH BODY SUPPLY｜CH C MCVD PH II
    • 0190-13522 HOSE ASSY｜CH LID SUPPLY｜CH C MCVD PH II
    • 0190-13523 HOSE ASSY｜CH LID RETURN｜CH C MCVD PH II
    • 0150-39229 CABLE ASSY 75 FT REMOTE EMO PRODUCER
    • 0150-39230 CABLE ASSY 100 FT REMOTE EMO PRODUCER
    • 0150-97517 CABLE ASSY 24VAC PWR TO GAS PNL INTLK PROD S
    • 0150-97523 CABLE｜ MAINFRAME DC POWER｜ PROD S
    • 0150-97524 CABLE｜ GAS PANEL EV MANIFOLD｜ MODULE B｜ PROD S
    • 0150-97527 CABLE｜ GAS PANL SERIPLEX DC PWR｜ MODULE C｜ PROD S
    • 0150-97530 CABLE｜ LEFT SIDE EMO｜ PRODUCER S
    • 0150-97533 CBL ASSY GPLIS DELIVERY LINE HEATER｜PROD
    • 0150-97545 CABLE ASSY RPS2 POWER PRODUCER S
    • 0150-97550 CABLE｜ SIDE EMO｜ PRODUCER S
    • 0150-97562 CH.C TEOS LINE MIDDLE 2 PRODUCER S
    • 0190-03016 HOSE ASSY｜ 03 RACK/CHILLER HOSE SET｜ PRODUCER
    • 0150-14249 CABLE ASSY｜ POWER｜ LINE HTR JACKET｜CHB PRODUCER
    • 0150-14250 HARNESS ASSY｜ T/C｜ LINE HTR JACKET｜CHB PRODUCER
    • 0150-14461 CABLE ASSEMBLY｜ NON-RF CONNECTOR｜ HEATER 2｜ 200MM SACVD PRODUCER
    • 0150-18375 SLOW SWITCH INTERLOCK 200MM PRODUCR
    • 0150-02738 CABLE ASSY｜ CHAMBER HEATER 2｜ PRODUCER S
    • 0150-03531 CABLE ASSY CH.C TEOS MIDDLE 300MM PRODUC
    • 0150-04413 CABLE ASSY｜ GAS PANEL｜ CH C｜ SERIPLEX｜ MEI｜ PROD S｜ SPLIT
    • 0150-04414 CABLE ASSY｜ NF3 PRESSURE INTLK｜ PROD S｜
    • 0150-04997 CABLE ASSY｜ SPLIT FRAME PRODUCER S｜ LOADLOCK AND XFER/LL PUMP SIGNAL｜ TOP
    • 0150-04998 CABLE ASSY｜ SPLIT FRAME PRODUCER S｜ ROBO
    • 0150-05047 CH.B TEOS LINE MIDDLE 1 #1 PRODUCER
    • 0150-05101 CABLE｜ TC｜ K-TYPE｜ PRODUCER
    • 0150-05726 HARNESS ASSY｜ T/C｜ LINE HTR JACKET｜CHC PRODUCER
    • 0150-06116 TEOS MIDDLE CH.A PRODUCER 300MM
    • 0150-07880 HARNESS ASSY｜ POWER｜ LINE HTR JACKET｜CHC PRODUCER
    • 0140-08564 PNEUMATIC HARNESS｜ PRODUCER SPLIT FRAME
    • 0140-09596 HARNESS ASSY｜ CHAMBER ILLUMINATION
    • 0140-11205 HARNESS｜ BOTTOM｜ COMMON H2O FLOW/AIR SW｜ PROD S SPLIT
    • 0140-12255 Harness assy｜ VME bus DC pwr｜ Producer
    • 0140-13826 HARN ASSY BOTTOM ROBOT/SLIT VALVE SNSR｜ SPLIT FRAME PROD S
    • 0140-14453 CABLE ASSY RF FILTER BOX FAN PRODUCER
    • 0140-18701 CABLE ASSY｜ CONTROLLER TO LINKMANAGER｜ PRODUCER SMIF
    • 0140-37796 HRNS ASSY CONTROLLER DELIVERY LINE PRODU
    • 0140-01521 HARNESS ASSY｜ 12 MFC｜ CHAMBER C｜ PROD S｜ SPLIT
    • 0140-01532 HARN ASSY｜ G-PLIS｜ SPILL｜ CH-A｜ PRODUCER
    • 0140-02265 HARNESS ASSY｜ HEATER DRIVER CONTROL A｜PROD S
    • 0140-04054 HARNESS ASSY｜ 12 MFC｜ CHAMBER A｜ PROD S｜
    • 0140-04055 HARNESS ASSY｜ 12 MFC｜ CHAMBER B｜ PROD S｜
    • 0140-04067 HARNESS ASSY｜ GAS PANEL EXH/DOOR SW INTLK｜ PROD S｜ SPLIT
    • 0140-04072 HARNESS ASSY｜ DOOR SWITCH｜ PALLET C｜ PROD S｜ SPLIT
    • 0100-35564 PCB Assembly｜lamp failure｜detector｜XE｜RTP
    • 0140-00743 HARNESS ASSY｜ COMMON CHAMBER｜ RTP｜ CMF
    • 0140-01179 HARNESS ASSY｜ CH. C FACIL FLOW SW ADAPTER｜ PROD
    • 0140-01518 HARNESS ASSY｜ RPS2/ENDPOINT INTERFACE｜ PRODUCER S
    • 0090-00569 ASSY OUTSOURCE 5 PHASE DRIVER 200MM PRODUCER
    • 0090-03733 ASSEMBLY｜ HIGH PRECISION SENSORS AND BRACKET｜ 200MM
    • 0090-05235 ASSY｜ LCF MOTION CONTROLLER｜ PRODUCER
    • 0100-01383 PCB ASSEMBLY｜MONITOR/KB/SERIAL/LIGHT P
    • 0050-60329 WELDMENT 5RA CH A｜ NF3｜ MIDDLE｜ 200MM PROD SPLIT
    • 0050-63086 WELDMENT｜ 5RA｜ CH A SILANE｜ MIDDLE｜ 200MM PRODUCER
    • 0050-83717 GAS LINE｜ POLKA YOKE IVL｜ 200MM PRODUCER SPLIT
    • 0050-85497 200MM HOSE ASSY｜ LID RETURN HX
    • 0050-86957 HOSE ASSY CHAMBER SUPPLY｜ PRODUCER
    • 0050-86991 HOSE ASSY CHAMBER C RETURN HEAT -X｜ PRODUCER
    • 0050-87162 HOSE ASSY｜ HTR LIFT 2 RET｜ PRODUCER SE MARKII
    • 0050-87164 HOSE ASSY｜ HTR LIFT 1 RET｜ PRODUCER SE MARKII
    • 0050-87167 HOSE ASSY｜ HTR LIFT 2 SEND｜ PRODUCER SE MARKII
    • 0050-88477 HOSE ASSY｜ CHAMBER RETURN｜ PRODUCER
    • 0060-01146 LABEL SET｜ PRODUCER FINAL INTEGRATION
    • 0090-00084 SENSOR ASSY｜ DUAL SPILL SENSOR｜ PRODUCER
    • 0041-12565 DRAWER｜ MULTIPLEXERS｜ 200MM SMIF PRODUCE
    • 0041-14145 WELDMENT｜ HEATER COOLING HUB｜ PRODUCER｜
    • 0045-00126 PUMPING CHANNEL｜ ANODIZED｜ PRODUCER 200MM
    • 0045-00198 PUMPING C-CHANNEL｜ AL OXIDE｜ PRODUCER 20
    • 0050-06397 WLDMNTRT 5RA P/P RIGHT 0｜2 PRODUCER GP
    • 0050-08566 WLDMNT 5RA TEOS BYPASS CH. A/B/C｜ PRODUC
    • 0050-08571 WLDMNT TEOS BYPASS LOWER CH. A/B/C PRODUCER
    • 0050-27561 HOSE ASSY｜ FACILITY WATER SUPPLY LOAD LOCK｜ PROD
    • 0050-27564 HOSE ASSY｜ FACILITY WATER SUPPLY CH. A1｜ PROD
    • 0050-27567 HOSE ASSY｜ FACILITY WATER RETURN CH. A1 PROD
    • 0050-27583 HOSE ASSY｜ FACILITY WATER SUPPLY CH. C1｜ PROD
    • 0050-27585 HOSE ASSY｜ FACILITY WATER SUPPLY RMTCLN-C1｜ PROD
    • 0050-27586 HOSE ASSY｜ FACILITY WATER RETURN RMTCLN-C1 PROD
    • 0050-27621 WELDMENT LOWER 5RA FL GEN GAS LINE 200MM PROD
    • 0050-40511 WELDMENT 5RA FINAL VALVE NF3 2.4 inch PROD
    • 0050-40774 WLDMNT 5RA CH B｜ NF3｜ MIDDLE｜ 200MM PROD
    • 0050-41315 HOSE ASSY｜FACILITY WATER SUPPLY CH. A2｜PROD S
    • 0050-41328 HOSE ASSY｜FACILITY WATER SUPPLY CH. C2｜PROD S
    • 0050-41329 HOSE ASSY｜FACILITY WATER RETURN CH. C2｜PROD S
    • 0050-45609 WELDMENT｜ 5RA｜ SILANE｜ CH B｜ UPPER｜ PROD
    • 0050-50718 WELD. NF3 UPPER｜ CH B｜ PRODUCER SPLIT
    • 0040-76211 DOOR｜ INNER FLAT BI-FOLD CENTURA
    • 0040-84677 UPPER REAR PANEL｜ SMIF FEND｜ SPLIT
    • 0040-87142 WELDMENT｜ BARATRON MANIFOLD PRODUCER 200/300MM
    • 0040-89514 Weldment Heater Cooling Hub Producer PECVD SAC
    • 0041-01102 BRACKET SENSOR LCF RECEIVER SLIT VALVE M
    • 0040-40441 PANEL｜ SIDE｜ AC DIST. BOX｜ PRODUCER-S
    • 0040-41595 MOUNTING TRAY｜ TRANSFORMER｜ PRODUCER S
    • 0040-42379 CONNECTING PLATE｜ 200 & 300MM PRODUCER
    • 0040-42380 ADAPTER PLATE｜ 200 & 300MM PRODUCER
    • 0040-42934 BRACKET｜ RIGHT｜ FINAL LINES｜ PRODUCER S
    • 0040-47723 MANIFOLD｜ OUTPUT｜ 1 HOLE｜ RIGHT｜ 200MM P
    • 0040-47724 MANIFOLD｜ OUTPUT｜ 1 HOLE｜ LEFT｜ 200MM PR
    • 0040-54104 SUPPORT CENTER RPS2 LID 200MM PRODUCER
    • 0040-61153 CATCH｜CHAMBER RACK｜ PROD S
    • 0040-61470 ENCLOSURE｜ RF FILTER PRODUCER
    • 0040-62256 FRAME｜ INDEXER｜ SMIF FRONT END PRODUCER
    • 0040-64668 BRACKET FRAME POSITIONING SMIF-FE｜ PRODU
    • 0040-75323 DOOR｜ LOWER SYSTEM AC CONTROLLER ANTISTA
    • 0040-76090 FRONT PANEL｜ LEFT REAR｜ CENTURA SKINS
    • 0040-38041 MANIFOLD｜ WATER｜ SAE 9/16-18 PRODUCER 20
    • 0040-38625 BELLOWS ASSY COOLER LIFT LL PRODUCER
    • 0040-38666 RF COVER｜ RIGHT｜ PRODUCER 200MM
    • 0040-38783 BRACKET GPLIS/CH GAS LINES 300MM PRODUCE
    • 0040-38943 PLATE ADAPTER MOD MFA MOUNTING PRODUCER
    • 0040-39310 BRACKET｜ SMART-COMM｜ 200MM SMIF-PRODUCER
    • 0040-39484 STOP｜ DRAWER｜ SMART-COMM｜ 200MM SMIF-PRODUCER
    • 0040-39636 PANEL｜ DRESS LOADLOCK｜ 200MM PRODUCER
    • 0040-39807 BRACKET｜ CHAMBER EV MANIFOLD PRODUCER
    • 0040-39946 Bellows Finger Lift Hastalloy Producer
    • 0040-05527 ENCLOSURE｜ KEYBOARD｜ PRODUCER
    • 0040-05582 BRACKET｜ LEFT｜ FINAL LINES｜ PRODUCER S
    • 0040-05911 FORELINE｜ REAR FACILITY｜ CH A｜ 200MM PRODUCER S
    • 0040-07536 ENCLOSURE｜ CHAMBER RACK｜ PRODUCER S
    • 0040-34563 BRACKET｜ UPPER TEOS LINE｜ CH A/B｜ PROD S SPLIT FRAME
    • 0040-34564 BRACKET｜ UPPER TEOS LINE｜ CH C｜ PROD S S
    • 0040-34816 COVER｜ RF FILTER PRODUCER
    • 0040-00673 PLATE｜BOTTOM CENTERING｜200MM SMIF-PRODUC
    • 0040-00674 PLATE｜ INSERT｜ INDEXER｜ 200MM SMIF-PRODU
    • 0040-00851 CONNECTOR｜ TOP｜ HEATER 200MM PRODUCER
    • 0040-01256 MANIFOLD INPUT 200MM SACVD PRODUCER
    • 0040-01641 BRACKET｜ MTG CH. A｜ DPA｜ PRODUCER｜ 200MM
    • 0040-01752 CLAMP｜ FORELINE｜ BOTTOM｜ NON-DPA｜200MM PRODUCER
    • 0040-02520 GAS BOX｜ SILANE｜ 200MM PRODUCER
    • 0040-03008 BASE RING DISPLAY COVER
    • 0040-03135 BOX｜ BIOCON CONNECTION｜ 200MM SMIF｜ PRODUCER
    • 0021-16887 COVER｜ VIEWPORT｜ TRANSFER CHAMBER LID｜ PRODUCER SE
    • 0021-18166 BRACKET W/OUT VLV SLD ENC SHORT PRODUCER SPLIT
    • 0021-25070 SPACER CHAMBER RACK PRODUCER S
    • 0021-32330 INSULATOR｜ SLEEVE｜ RF FEEDTHROUGH｜ PRODUCER 200MM
    • 0021-35163 PLATE｜ REFLECTOR｜ CHMBR BOTTOM
    • 0021-37863 PIN SLOTTED RF CONTACT PRODUCER
    • 0021-39833 BRACKET｜ SW｜ SMIF FEND｜ 200MM PRODUCER
    • 0021-42166 BRACKET｜ CH C TMS&O2 UPPER LINE｜PRODUCER S
    • 0021-45466 PRODUCER PILOT GUIDE RIGHT
    • 0040-00665 SHELF｜ INDEXER｜ SMIF FRONT END｜ PRODUCER
    • 0040-00666 END EFFECTOR｜ SMIF 200MM PRODUCER
    • 0021-02691 BRACKET｜ROBOT SUPPORT｜LEFT｜200MM SMIF-PRODUCER
    • 0021-02999 CONNECTOR｜ BOTTOM｜ HEATER 200MM PRODUCER
    • 0021-03001 CONNECTOR POWER SOCKET 3MM DIA PRODUCER
    • 0021-03010 BRACKET｜CABLE CARRIER｜LFT STDF｜200MM SMIF-PRODUCER
    • 0021-03121 BRACKET｜CABLE CARRIER｜RGT STDF｜200MM SMIF-PRODUCER
    • 0021-03412 BRACKET｜ SWITCH｜ SMIF-FE｜200MM SMIF-PROD
    • 0021-03601 PIN LIFT HANDLE BALL REMOVAL TOOL RTP
    • 0021-03654 BLOCK GAS SPRING CH 200MM PRODUCER
    • 0021-04297 MANIFOLD CLEAN GAS 200MM PRODUCER
    • 0021-04304 BUSHING｜ DELRIN GAS BOX 200MM PRODUCER
    • 0021-06099 COVER MIXING INSERT LID PRODUCER 200MM
    • 0021-06500 PLATE｜ MANIFOLD｜ LID｜ CHAMBER PRODUCER 200MM SACVD
    • 0021-06955 COVER｜ BIOCON｜ CONNECTION BOX｜ 200MM-SMIF｜ PRODUCE
    • 0021-06956 PLATE｜ BLOWER MOUNTING｜ 200MM SMIF BIOCON｜PRODUCER
    • 0021-06977 HINGE｜ PLATE 1/2 RABBIT｜ 200MM PRODUCER
    • 0021-08977 BRACKET RIGHT POWER SUPPLY CNTRL CENTURA
    • 0021-13303 BAR｜ SIDE PALLET MTG SPCR｜ GAS PANEL｜ PROD S｜ SPLI
    • 0021-14501 Blankoff｜exhaust duct｜bottom｜Prodroducer split frame
    • 0021-15894 PLATE｜ COVER｜ GPLIS｜ PROD S｜ SPLIT FRAME
    • 0021-15954 BRKT. 1/2 & 1/4 GAS LINE 300 MM PRODUCER
    • 0021-15991 BLANKOFF｜ WATLOW｜ PROD S｜ SPLIT FRAME
    • 0020-82679 GUIDE NUT｜ LID INTERLOCK｜ 300MM PRODUCER
    • 0020-86469 GASKET TEFLON REFLECTOR PLATE 200 MM XE RTP
    • 0021-01631 FLANGE｜ RF｜ PRODUCER
    • 0021-01640 RF STRAP｜ RF INPUT｜ PRODUCER 200MM
    • 0021-02417 ALUM WFR PRECISION OTF CALIBR 200MM｜ RTP
    • 0021-02420 BRACKET ALIGNMENT RTP
    • 0021-02690 GUSSET｜OTF SUPPORT｜200MM SMIF-PRODUCER
    • 0020-31081 PRODUCER TRANSFER CHAMBER CLAMP
    • 0020-31082 Producer CH shipping clamp
    • 0020-39499 RING｜RTNR｜SI INSERT RTP
    • 0020-42492 BLANKOFF NF3 GAS｜ 200MM PROD APF｜ PECVD
    • 0020-43126 BRACKET｜ IVL｜ 3WAY DIVERT VALVE｜ PRODUCER
    • 0020-43229 LATCH BRACKET｜ CHAMBER RACK｜ PRODUCER S
    • 0020-43422 SHIPPING BRACKET｜ SIDE｜ INDEXER｜ PRODUCER
    • 0020-47701 BRACKET｜CABLE CARRIER｜LFT STDF｜200MM SMIF-PRODUCER
    • 0020-62382 PLATE｜ MTG MOTION CONTROL BOX｜ PRODUCER S
    • 0020-62383 BRACKET｜ MOTION CONTROL BOX｜ PRODUCER S
    • 0020-70525 SCREW LIFT HOOP HAYNES 242 PRODUCER SE
    • 0020-13622 Shim｜door hinge｜Producer SE｜split
    • 0010-26727 HEATER LIFT ASSY (Producer)
    • 0010-28658 OUTSOURCED ASSY｜ CONTROL RACK｜ PRODUCER
    • 0010-29675 HEATER ASSY｜ MC TP SR W/ALN INSL｜ PRODUCER 200MM
    • 0010-35916 Assy｜ Air Flow Pressure Switch｜ RTP
    • 0010-39124 ASSY REFERENCE HIEGHT TOOL RTP
    • 0010-39185 Assy｜TEOS lower 200mm CH｜A/B/C｜Producer
    • 0010-76538 REAR LEFT HAND DOOR CENTURA
    • 0015-00387 MOD PURCH PART｜ FRONT CENTER RAIL｜ LCF CARDCAGE
    • 0015-00679 HINGE｜ CHAMBER RACK TO FRAME｜ PRODUCER S
    • 0020-02480 BRACKET｜ CHAMBER SET｜ PRODUCER S
    • 0010-05157 ASSEMBLY HTF/RTP BEZEL
    • 0010-11208 ASSY OUTSOURCE PIN LIFT BELLOWS 200MM SA
    • 0010-15563 ASSEMBLY｜ PROBE｜ XE RTP CHAMBER｜ .080 DI
    • 0010-22868 ASSEMBLY｜ STD EXHAUST DUCT TPCC/RTP

  • NEW(OEM&2ND)(OEM&2ND)

    • 0040-07423 TOP PANEL｜ REAR｜ UGP

  • OEM NEW

    • 3700-02758 SEALCO-SEAL ISO 100 POLYMER/NITRILE
    • 3700-02920 SEAL DOVETAIL 5.609ID X .139CSD CHEMRAZ
    • 3700-03336 SEAL DOVETAIL 12.961ID X .139CSD CHEMRAZ SC513 80DURO WHT
    • 3800-01117 RGLTR FLOW 1.OLFM W/PRES
    • 3870-01245 VALVE PNEU BLWS 2 WAY MINI NC-11(SS-BNV51-C)
    • 3870-01603 VALVE PNEU DIAPH 140PSIG 1/4VCR NC 1/8FIT UJR-F/F
    • 3870-01616 ISO VALVE
    • 3870-01734 VALVE PNEU DIAPH 145PSI NC 1/4VCR-FX1/8-27NPT 10RA
    • 3870-01811 VALVE BLOCK DIAPH 3WAY 1/4VCR-F/F/M NC/NC SST 10RA(AS568A-359)
    • 3870-02708 VALVE IDA KF-25 1/2VCR-M/F 316L SST｜ 93-6001 MKS
    • 4020-00164 FLTR IN-LN GAS 3000 PSIG 1/4-GSKT SEAL MALE-VCR(AS568A-138)
    • 4020-01094 FLTR IN-LN GAS 4000PSIG 1/4-GSKT SEAL M
    • 4020-01136 FLTR IN-LINE GAS 3000PSI 1/4VCR-MM 30SLM SST 7RA
    • 4020-01140 FLTR CARTRIDGE DI WATER
    • 4060-00486 MANF ASSY VQ1000 PL W/NP420-DN1 SI UNIT
    • 5010-01015 ADHS SLFLKG THD CLRVBRTI
    • 5010-01048 SLDR ALLOY-SB5 FLUX 282 CORE 66 DIA .02(AS568A-381)
    • 3030-01915 MFC 1660 200SCCM HBR 1/4VCR M/K-F NC HOV CDE 10RA
    • 3030-04879 SNSR FLOW INSERTION SST｜ FCS-G1/4 A4-NA-H1141
    • 3030-05023 MFC 1660 50SCCM NF3 1/4VCR M/K-F NC HO
    • 3030-06442 MFC 8160 300SCCM N2 1/4VCR MTL NC HOV 9D 10RA
    • 3030-06443 MFC 8160 20SCCM N2 1/4VCR MTL NC HOV 9D 10RA
    • 3030-06444 MFC 8160 200SCCM N2 1/4VCR MTL NC HOV 9D 10RA
    • 3030-06445 MFC 8160 100SCCM N2 1/4VCR MLT NC HOV
    • 3030-12510 MFC4400 100SCCM N2 1/4VCR Mtl NC 9P-D 15
    • 3030-12516 MFC4400 20SCCM N2 1/4VCR mtl NC 9P-D 15RA w/unibody
    • 3030-13616 MFC 1661C 3SLM SIF4 1/4VCR MTL NC HOV｜ MLTFLO II
    • 3030-13797 MFC 8161C 10SCCM N2 1/4VCR MTL N/C HOS 9P-D 4RA
    • 3030-14902 AERA MFC TC FC-PA7800C
    • 3030-15593 MASS FLOW CONTROLLER (C4F8 500sccm)
    • 3030-15595 MASS FLOW CONTROLLER (SF6 500sccm)
    • 3300-01346 FTGFLANGE BLANK-OFF NW25 1.57ODX.20THK S
    • 3300-01348 FTG FLANGE BLANK-OFF NW50 2.95OD X .20
    • 3300-02458 FTG TUBE ELBOW 3/4
    • 3300-02921 VALVE FLOW CONTROL 1MPA 1/8MNPT X 1/8T M
    • 3300-03453 FTG TBG PLUG 1
    • 3300-04524 FTGTBG UN 3/4T X 3/4T 2.11L SST
    • 3300-09255 FTG TBG 4-WAY CROSS NW50-NW25 SST
    • 3310-01071 GAUGE TC 1-1000 MTORR METALTUBE 1/8
    • 3310-01081 ION GAUGE NUDE｜ 274-043
    • 3310-01193 GAUGE VAC STABIL ION 2-3(UFC-1660 NF3 200 sccm)
    • 3310-01255 Gauge micro-ion vacuum 2.75
    • 3350-50000 FINGER CERAMIC TEFLON COATED(200sccm)
    • 3400-01890 PTFE HOSE｜ CARBON BLACK FILLED｜ 1/2X1500CM
    • 3480-01055 SMC SHOCK ABSORBER
    • 3500-01013 NUT HEX FULL 4-40 SST PSVT
    • 3510-01016 ORF RSTR FLOW 500SCCM N2 1/4VCR-M/M UNION
    • 3510-01055 ORF RSTR FLOW 50SCCM N2 @35PSI 10RA 1/4VCR
    • 3620-02332 KYPD REMOTE W/CABLE FOR ONBOARD CRYO PUMP
    • 3690-01092 SCRCAP SKT HD 10-32 X 3/8L HEX SKT SST
    • 3690-02139 SCR MACH BTN HD 10-32 X 3/8L HEX SKT SST
    • 3690-03269 BRG LEADSCR&NUT ASSY .5DX.1LEADX4TRVLX8.15L 50U
    • 3690-04088 SCR CAP SKT HD 10-32X1/2L HEX SKT SST W/
    • 1410-01365 HEATER JACKET 30 MIL B LAYER LOWER/BYPASS ZONE 4 CHAMBER A/B/C ITEM 7 200MM PRODUCER
    • 1410-01152 HTR BAND SEIKO SEIKI STP301CVB TMS3 110V
    • 1040-00289 METER｜ THERMOCOUPLE 10-CH｜ PRESET TYPE-R
    • 1110-00110 NETWK SWITCH｜ ENET 8 PORT 10/100BASE T
    • 1270-01659 SW PB DPST 10A 125/250V CHEAT-INTLK VSBL-DEFEAT
    • 1270-02544 RTRY LOCKABLE 6P 600VAC 30A
    • 1360-00135 TRANSFORMER
    • 1360-00169 TRANSFORMER UNIT FOR SMIF FABS 81 INCH
    • 0227-36658 H.O.T. PACK ASSY｜ ANALYZER CARTRIDGE 704NM
    • 0227-41892 RECEIVER CASS SPECIAL
    • 0230-20156 PVD SYSTEM｜ PROCESS KIT CLEAN MANUAL
    • 0240-75106 KIT｜ CENTURA CHAMBER THROUGH THE FLOOR VACUMN CONN
    • 0242-07994 DUAL SPRING THROTTLE V/V
    • 0242-19092 ROUGH PUMP C/B
    • 0242-33245 RGA VALVE
    • 0242-70220 P5000 ROBOT
    • 0270-04033 SUPPORT PLATE SPACER｜SHIPPING U-FRAME｜ULTIMA 200MM
    • 0270-04034 SUPPORT PLATE｜SHIPPING U-FRAME｜ ULTIMA 200MM
    • 0270-04306 TOOL｜ FIXTURE-B BPSG REFLECTOR
    • 0270-04307 TOOL｜ FIXTURE-T BPSG REFLECTOR
    • 0270-20016 Lift Bellows Wrench
    • 0270-20044 TOOL CALIB. ORIENTER 8
    • 0270-35098 TOOL｜ PROBE WRENCH｜ MOD II
    • 0620-00618 CABLE ASSY 20M｜ CONTROL UNIT TO TMS｜ SEIKO SEIKI
    • 0620-01734 CABLE ASSY 15A 208V L6-15P IEC320-C13 14/3SJT 132
    • 0620-02694 CABLE ASSY COAX RG-217/U 100FT R/A QDS-U
    • 0620-03040 CABLE SCSI-3｜ 2-DEVICE TPE 68-PIN FLAT 3FT
    • 0660-00020 CARD QUAD ELECTROMETER BOARD UHV/STAIL
    • 0660-01699 CARDCONVECTRON MODULE 5-CH RFI SUPPR W/EJECTOR
    • 0680-01215 CB MAG THERM 3P 240VAC 30A BOLT-ON QOB TYPE
    • 0680-01420 CB SHUNT TRIP FOR J-FRAME 110-240VAC
    • 0680-01429 CB SHUNT TRIP FOR F-FRAME 208-380VAC
    • 0690-01037 CLAMP HINGED NW50 WING-NUT & SCR-CLOSURE
    • 0720-05100 CONN COAX RF ADPTR C(F) TO QC(M) W/.250DIA-HOLE
    • 0820-00213 DET TRANSMITTER AMMONIA 0-100PPM LINEAR OUTPUT(7014131-1)
    • 0820-01031 DETCALIBRATION CUP BAYONET STYLE NH3 DETECT
    • 0850-00088 THRU-WALL MOUNT｜ FLAT PANEL DISPLAY VESA
    • 0920-00013 FLOURINE GENERATOR
    • 0200-20378 PLATE｜ INSULATION｜ GAMMA CU
    • 0200-35084 DOME｜ UPPER ATM
    • 0200-35323 RING｜ CAPTURE｜ CERAMIC｜ 195MM
    • 0200-35702 RING｜ EDGE｜ DXZ+
    • 0200-35706 Liner｜ Ceramic｜ Sin DXZ(A022)
    • 0200-35780 QUARTZ PIN｜ STANDOFF｜ COOLDOWN
    • 0200-35828 RING｜ OUTER｜ 200MM｜ FLAT｜ 1.5MM OH｜ CERA
    • 0200-36118 BATCH EDGE RING｜ 200MM WAFER｜ SILICON CO
    • 0200-36638 BLADE QUARTZ REDUCED CONTACT｜ 200MM RTP
    • 0200-36666 ISOLATOR CERAMIC PRODUCER 200 MM
    • 0200-36689 RING｜ SINGLE｜ LOW PROFILE｜ 200MM SNNF｜ Q
    • 0200-39142 RING｜FOCUS 1
    • 0200-39152 RING｜SINGLE｜CERAMIC ESC｜ 200MM SNNF｜ POLY DPS
    • 0200-00761 CAP GAS DISTRIBUTION PLATE ASP-300MM
    • 0200-00812 FOCUS RING
    • 0200-00822 DOME QUARTZ｜POLY DPS
    • 0200-01003 GAS DISTRIBUTION PLATE ASP-300MM
    • 0200-01038 CAPTURE RING｜ 150MM ROUGHENED｜ HT DPS
    • 0200-01155 DEPOSITION RING｜ DEEPER GROOVE｜ 200MM BESC PVD CU｜
    • 0200-01225 Q`TZ LINER RING 300mm
    • 0200-01388 ASP ???????????? 300mm Q`TZ SPACER RING
    • 0200-01612 INJECTOR｜ GAS｜ 27 HOLES｜ .020 DIA｜ QTZ｜
    • 0200-01820 notch insert ring
    • 0200-02006 NM INSERT RING｜ EMAX｜ 300MM
    • 0200-02040 INSERT｜ DOUBLE RF CONN SBS｜ SIP II 200MM
    • 0200-02352 SINGLE RING 300mm
    • 0200-02500 300mm Ceramic Lid
    • 0200-02626 300mm E MAX Lover ring q`tz
    • 0200-02812 DEP RING｜ 200MM SIP TA(N)｜ SNNF ESC｜ 99.8% AL2O3｜ KACHINA 800RA TWAS
    • 0200-03280 SHADOW RING 150MM JMF NCSR 3.0MM EE
    • 0200-04988 Nozzle｜ALN｜1.76L x .014 dia｜-N-｜HDPCVD
    • 0200-05106 DPS2 QUARTZ RING(2PIECE KIT)
    • 0200-10169 Plate Edge Cover DxZ GECO
    • 0200-10296 INSULATOR｜BULKHEAD｜CATHODE｜DPS
    • 0200-10650 COVER｜CERAMIC｜PUMPING CHANNEL｜GIGA-FILL SACVD
    • 0200-18073 SAPPHIRE TUBE(911-02120A)
    • 0200-18074 SHEATH｜RPSC｜HDP-CVD(911-02164A)
    • 0200-20215 HOUSING｜ DOUBLE RF CONNECTOR｜ VECTRA IMP(A018)
    • 0200-20325 PEDESTAL COVER UPPER 6
    • 0200-20331 COVER RING 8
    • 0190-19024 RF MATCH｜ 13.56 MHZ｜ 3 KV｜ 35 A｜ NAVIGAT
    • 0190-20004 FEED THRU ROTARY ASSY SOURCE BASIC
    • 0190-21446 PURCH SPEC 60FT STABIL ION GAUGE CABLE
    • 0190-22314 NTWRK PORT SERVER EL160 16-CH W/PWRSP 100-250VAC 50/60HZ REALPORT FIRMWARE V1.5
    • 0190-26727 BRG ANGULAR CONTACT SPECIAL 1×1.375 ODx.1875 W
    • 0190-28658 EyeD HP SPECTROGRAPH｜ RoHS｜ SD1024F｜ 24
    • 0190-28967 SIGNAL EXTEND CABLE FOR REMOVABLE FLASH MEMORY DRIVE
    • 0190-28969 REMOVABLE FLASH MEMORY DRIVE FOR CENTURA
    • 0190-30039 SPECIFICATION CONTROL SCSI MAX DRIVE 1024MB 3.5
    • 0190-30233 CONTROL PC｜ EYED TOWER｜ 3.4GHZ ROHS
    • 0190-30486 HDP ULTIMA BIAS MATCH｜ 3155031-043A
    • 0190-31735 THERMORACK CHILLER 1200 ETHYLENE GLYCOL
    • 0190-35208 ASSY｜ PCB｜MCVD CHAMBER
    • 0190-35217 DCVD COOL DOWN CHAMBER INTERFACE
    • 0190-35221 SWITCH 7/16-20 SAI/MS CLOSE DECREASING TORR
    • 0190-35712 THERMOCOUPLE PLASMA CHUCK(HS007TC)
    • 0190-70109 ASSY｜PCB ASP CHAMBER INTERFACE
    • 0190-75073 BALL SCREW ASSY｜ LEFT HAND｜ SPEC
    • 0190-76028 PLASMA GENERATOR
    • 0195-04829 Flour Optic Temperature Monitor｜ 300mm eMAX｜ Dual Zone ESC
    • 0200-00089 Top Quartz APS+F 200MM
    • 0200-00136 RING｜ FOCUS 195MM JEIDA MAJOR FLT 1
    • 0200-00203 GDP SINGLE OUTER DONUT
    • 0200-00204 GDP. Single Center disk
    • 0200-00207 TIP｜SUSCEPTOR SHAFT｜OUTSIDE
    • 0200-00250 RING｜ CAPTURE C-ESC｜ SNNF｜ 200MM｜ METAL DPS
    • 0200-00303 PIN｜ LIFT｜ .120 DIA HOLE｜ SAPPHIRE｜ SINERGY
    • 0200-00354 RING PURGE WXZ+ FC NOTCH
    • 0200-00381 FOCUS RING｜ CATHODE｜ PHOTOMASK｜ DPS
    • 0200-00446 CERAMIC LINER｜ CATHODE｜ PHOTOMASK｜ DPS
    • 0200-00498 lapture
    • 0190-09185 THERMOCOUPLE PRSP
    • 0190-09230 SW.15
    • 0190-09539 SEAL 500 ZA SLIT VALVE ACTUATOR
    • 0190-09663 ACTUATOR｜ 5000 ZA SLIT VALVE
    • 0190-09755 TC PROBE｜ CHUCK ASP
    • 0190-09779 Assy｜cover｜W/B LLC door｜conductive paint
    • 0190-10630 Purchase Spec｜ 75FT UHV Stabil Ion Gauge cable
    • 0190-12609 PURCHASE SPEC.｜ 6-CIRCUIT CHASSIS WITH F
    • 0190-14242 PURCHASE SPEC.｜ 75FT STABIL ION GAUGE CABLE
    • 0190-14247 GAUGE PRESS -.1 TO .7MPA/30
    • 0190-14248 GAUGE PRESS 0-1.1MPA/0-160PSI 2IN
    • 0190-14591 STEEL HEAD 5
    • 0190-14775 FACILITY CNTRL. PNEUMATICS & INTERLOCKS POLISHER LK
    • 0190-15790 BOX｜ MAINTENANCE PURGE｜ HTF CHAMBER
    • 0150-70001 CABLE ASSY GROUND STRAP
    • 0150-75198 CABLE FLAT｜ CENTURA FDD/MSM INTERCONNECT
    • 0150-76237 CABLE ASSY DRIVER CONTROL｜ I/O BLKHD TO
    • 0150-76286 CABLE ASSY HEATER AXZ/WX
    • 0150-76318 CABLE｜ RF COAXIAL｜ 55FT｜ 13.56 MHZ
    • 0150-76822 CABLE ASSY AI MUX 3 REMOTE GAS INTERCONN
    • 0150-77360 CABLE｜PLATEN ENCODER｜50FT｜MIRRA200MM(ICT 490489)
    • 0190-00410 LEADSCREW｜ LIFT
    • 0190-00958 BRG｜ 4 point contact｜ 8.625OD x 8ID X .3125W｜ w/Castrol 296
    • 0190-00961 BRG｜ CONT 1.375 OD X 1.0 ID X .157W｜ BRAY 815 Z OELD
    • 0190-01403 T/C ASSY HEATER WXZ
    • 0190-01627 LAMP ASSEMBLY CYCLED 520 WATT RADIANCE C
    • 0190-01893 PWRSP 120VAC/30AMPS
    • 0190-08815 300MM ENDURA UPS/CVCF AS DISCONNECT BOX
    • 0150-11035 CABLE ASSY｜ SIGNAL TOWER INTERFACE
    • 0150-12587 CABLE ASSY CNFG SDS PWR 50FT CMP CNFIG SDS
    • 0150-13163 C/A ROBOT CONTROL｜ 75 FT. EMC COMP.
    • 0150-13167 75FT UMBILICAL CABLE
    • 0150-13345 ASSY｜ POWER CABLE｜ DUAL ZONE HEATER
    • 0150-20143 WIRE｜ JUMPER 4PIN CONN｜ GEN RACK EMO
    • 0150-21113 CABLE ASSY｜ NESLAB SYS 3 INTCNT-100FT
    • 0150-21118 CABLE ASSY M/F PUMP CONTROL INTCNCT–100FT
    • 0150-21419 CABLE ASSY RF GEN DC PWR INTCON CEM 96
    • 0150-21420 Cable assy Rem 1 intcon 75ft -Cem 96
    • 0150-21421 Cable assy REM 2 intcon 75ft-CEM 96
    • 0150-21664 CABLE ASSY｜ N(M)｜ R/A TO N(M)｜ STR RG-217 75FT
    • 0150-21665 CABLE ASSY｜ N(M)｜ R/A TO N(M)｜ STR RG-217 52FT
    • 0150-21992 CABLE ASSY｜ CRYO 1｜2 WTR FLOW INTLK 100F
    • 0150-35740 C/A｜ EMC COMP.｜ HEAT EXCHANGER｜ 75FT CSI
    • 0140-38156 HARNESS PLIS TO CIRCUIT BRAKER G-PLIS/EPLIS
    • 0140-77279 PAD COND1 E｜CNTRL-MNFR(14-00865)
    • 0140-77280 PAD COND2 E｜CNTR-MNFR(JT Baker)
    • 0140-77281 PAD COND3 E｜CNTRL-MNFR
    • 0140-77289 HD ROTATION1｜CNTR-MNFR(0200-FT273)
    • 0140-77290 HD ROTATION2｜CNTRL-MNFR
    • 0140-77291 HD ROTATION3｜CNTRL-MNFR (C7-3H3-SU-901)
    • 0140-77292 HD ROTATION4｜CNTRL-MNFR(PI16S011)
    • 0140-77293 ROBOT ENC｜CNTRL-MNFR(P1146649)
    • 0140-77295 HARNESS LIGHT TOWER CNTR-(CK021156)
    • 0140-78488 CABLE AC-POWER CLEANER(200MM)
    • 0150-00490 CABLE｜HEATER LIFT｜GIGA-FILL SACVD
    • 0150-04962 CABLE ASSY｜ DC SOURCE｜ 75 FT 200MM
    • 0150-05181 CABLE ASSY｜ HEATER PLUG｜ BOTTOM MODULE
    • 0150-05522 CABLE｜ CONT BLKHD-MAINF BLKHD｜ ENC
    • 0150-06051 C/A SMIF ASYST 72IN INTERLOCK LLA/LLB KP
    • 0150-10146 CABLE ASSY｜CHAMBER XDUCER｜UHP
    • 0140-04099 ROBOT X｜ CNTRL-MNFRM BKHD｜ 50 FT
    • 0140-04600 HARNESS｜ PUMP INTF｜POWER｜75FT
    • 0140-05014 PAD COND 1 PWR｜ CNTRL-MNFRM
    • 0140-05015 PAD COND 2 PWR｜ CNTRL-MNFRM
    • 0140-05082 HARNESS CONTBULKHD HEADSWEEP-MAINFBKHD HEAD SWEEP｜ PWR
    • 0140-05086 CABLE POWER｜ PLATEN 1 CNTRL-50FT
    • 0140-18155 HARNESS ASSY｜ REMOTE SERIPLEX POWER FEED
    • 0140-20056 HARNESS AC 5-PHASE
    • 0140-20944 HARNESS ASSY WAFER SLIP W/B LLK ON ENDURA
    • 0140-01808 HARNESS｜ POWER MAGNET CORD｜ MXP/+｜ 31
    • 0140-02924 HARNESS ASSY｜BUNDLED｜200 MM CHAMBER｜PROD S
    • 0100-20083 PCB ASSY｜ CRYO TEMP/AI MUX BOARD
    • 0100-20143 PCB ASSY L LOCK WAFER SENSOR
    • 0100-20146 PCB ASSY｜ SERIAL/VIDEO INTERCONNECT (3RD MONITOR)
    • 0100-20177 PCB ASSY WATER/SMOKE DET CENT PVD
    • 0100-20230 PCB｜ RELAY CONTROL DAUGHTER
    • 0100-35049 ASSY｜ PCB SYS RESET/INTLK SEL
    • 0100-35065 PCB ASSY｜ SERIAL ISOLATOR
    • 0100-35103 PCB ASSY｜ MAG GEN INTERFACE ASP
    • 0100-35250 PCB ASSY｜CHAMBER INTERFACE｜DPS CENTURA
    • 0100-76124 DIGITAL INPUT OUTPUT PCB
    • 0140-00782 CABLE ASSY｜ RPS2｜ NF3｜ OVER PRESSURE
    • 0090-03547 Elec Assembly Switch Lake Monitor Water
    • 0090-03618 ASSY｜ LT 3-COLOR R-Y-G｜ LED TYPE
    • 0090-05154 ASSEMBLY｜ MAXFILTER-II
    • 0090-05327 ASSY. PCB DUAL GAS LEAK DETECTOR WITHOUT DISPLAY
    • 0090-09079 LAMP ASSY｜MECURY 16 IN. LEADS
    • 0090-09139 CABLE ASSY｜ PHOTO HELIX 2｜ UHP
    • 0090-35017 ASSY｜STATUS LIGHTS/SONALERT
    • 0090-35123 MOTOR/BRAKE/ENCODER ASSY STORAGE ELEV.
    • 0090-35695 ESC ASSY. 300MM｜ NOTCH｜ DPS METAL
    • 0090-39195 ASSY｜ ELECT｜ 5 PHASE MOTOR
    • 0100-00241 PCB ASSEMBLY TC AMP INTERLOCK 300XZ
    • 0100-00396 AI/O B/D
    • 0100-00493 Chamber interface B/D
    • 0100-00698 ASSEMBLY｜ PCB｜ CHAMBER LIFT RF FILTER
    • 0100-00893 PCBA TC GAUGE
    • 0100-00975 ASSY PCB STEPPER CONTROLLER2
    • 0100-01321 DI/O B/D
    • 0100-01894 ANALOG OUTPUT
    • 0100-01984 PCB ASSEMBLY｜ WAFER ORIENTER CONTROLLER BOARD
    • 0100-01995 PCB Assembly｜ Analog I/O board w/var. WD
    • 0100-02311 PCB ASSEMBLY｜ SCSI FORCED PERFECT TERMINATOR｜ IDC50
    • 0100-09106 PCB Assy Expanded Gas Panel
    • 0100-09162 WPCBA MANOMETER SELECT BD
    • 0100-09222 PCB ASSEMBLY CHAMBER INTERFACE BOARD ASP
    • 0100-13024 ASSY｜ PCB INTERFACE PROCESSOR DIST.
    • 0100-20000 PCB ASSY｜ 64 CHANNEL MUX
    • 0100-20003 DIGITAL INPUT OUTPUT PCB
    • 0100-20051 PCB ASSY｜ TURBO INTERCONNECT
    • 0050-76030 Heater Bypass Gasline
    • 0050-87169 HOSE ASSY｜ HTR LIFT 1 SEND｜ PRODUCER SE MARKII
    • 0050-98991 HOSE ASSY｜ FACILITY WATER RETURN｜ LL-PUMP｜ PRODUCER
    • 0050-00566 WLDMNT｜CH A N2 DIVERT｜ DXZ SILANE｜5200
    • 0050-04306 WELDMENT｜ N2P｜ FUJIKIN｜ 3/7 PALLET 31
    • 0050-06117 WLDMT｜ FORELINE｜ POSITION C｜ ULTIMA
    • 0050-25994 MANIFOLD WATER SOURCE 13
    • 0050-26600 HOSE ASSY｜ DXZ｜ FLUORINE GENERATOR
    • 0050-27563 LL PUMP WATER RETUF
    • 0050-27570 HOSE ASSY｜ FACILITY WATER RETURN RMTCLN-A1｜ PROD
    • 0050-27579 HOSE ASSY｜ FACILITY WATER SUPPLY CH. B2｜ PROD
    • 0050-40779 WELDMENT｜ 5RA｜ CH C｜ SILANE｜ MIDDLE｜ 200
    • 0050-41323 HOSE ASSY｜FACILITY WATER SUPPLY CH. B1｜PROD S
    • 0050-41325 HOSE ASSY｜FACILITY WATER SUPPLY RMTCLN-B1｜PROD S
    • 0050-41326 HOSE ASSY｜FACILITY WATER RETURN RMTCLN-B1｜PROD S
    • 0040-76179 CROSS BAR｜ TRANSPORT CART
    • 0040-78071 PANEL｜ CENTER｜ REAR SKIN
    • 0040-78072 PANEL｜ CENTER｜ SHORT｜ POLISHER SKIN
    • 0040-79919 LINER｜ DGDP｜ CHAMBER｜ WAFFLE-LESS｜ 200MM E-MAX
    • 0040-79920 LINER｜ CATHODE｜ MAG RING｜ WAFFLE-LESS｜ DIRECT-COOLED｜ 200MM E-MAX
    • 0040-85432 ENCLOSURE ASSY｜ TORROID MOUNTING GFCI TOP FEED GEN
    • 0040-86511 DUCT｜ FACILITIES TRANSITION｜ ETCH CR PLE
    • 0040-86545 BRACKET WATER FLOW
    • 0040-87410 ADAPTER｜ WIDE BODY INDEXER CMF CENTURA
    • 0040-88973 SILL｜ LONG SIDE｜ STANDARD PAD CONDITIONER
    • 0040-89837 GIMBAL BASE (UNIVERSAL) PAD CONDITIONER 200MM
    • 0041-10173 PLATE｜ FISCO TEMP SENSOR 300 EMAX
    • 0041-10412 PANEL｜ GFI CIRCUIT BREAKER MOUNTING｜ EG33AC
    • 0040-41968 300mm slit Door liner
    • 0040-47677 FACEPLATE｜ SIN｜ XG｜ DXZ DCVD
    • 0040-50879 GDP｜ 111R HOLES｜ NARROW GAP｜ HART 300MM
    • 0040-51493 WATER MANIFOLD｜ CHAMBER LINER｜ 300MM｜ EM
    • 0040-52370 PEDESTAL RF 300MM｜ 11.52 OD｜ AXIOM
    • 0040-60523 RF COVER｜ LEFT｜ PRDUCER 200MM
    • 0040-60925 PLUG｜ UNIVERSAL SHIPPING｜ ALL PRODUCER
    • 0040-61536 DRAWER｜ ROBOT CONTROLLER｜ 200MM SMIF-PRO
    • 0040-62315 UPPER DOOR SYSTEM AC CONTROLLER ANTI-STA
    • 0040-64000 MAINFRAME MISK
    • 0040-64739 DOOR REAR COMMON
    • 0040-75195 CHASSIS｜ 2-PHASE DRIVER｜ MOTOR LIFT
    • 0040-75824 PANEL｜PRIMARY GEN RACK BULKHEAD
    • 0040-75827 MCA COVER｜ BOTTOM｜ 300MM ESC
    • 0040-75906 RIGHT ARM VHP+
    • 0040-75907 LEFT ARM VHP+
    • 0040-39260 RING｜ INNER｜ CUXZ｜ SST SMALL 201/197MM｜
    • 0040-39266 WINDOW｜ALUM FRAME｜QRTZ LID｜WXZ｜AXZ
    • 0040-39372 BELLOW WELDMENT｜ THROTTLE VALVE｜ DPS
    • 0040-40050 PLATE｜ FRONT
    • 0040-04109 COVER｜ FLOOR｜ CH A｜ SIN｜ CMF
    • 0040-04136 Cooling Base
    • 0040-04221 LID｜ LEXAN｜ SLIT LINER DOOR
    • 0040-04409 COVER SHIPPING SST HEATER 300MM TXZ
    • 0040-05881 COVER RF WATER BOX SUB-ZERO ESC 1.574
    • 0040-07771 ESC ELECTREC
    • 0040-13250 COVER｜FRONT DOOR｜N.B. LLC｜COND. PAINT
    • 0040-18219 LASED｜ PEDESTAL｜ 200MM SNNF SML FLT W/WTM｜ HDPCVD
    • 0040-20090 KICK PLATE｜ PAINTED｜ NO SMIF｜ NARROW BOD
    • 0040-20292 SHORT FEED｜ LAMP
    • 0040-20418 Shafted Slit Valve Bellows Assembly
    • 0040-20727 TUBE FLANGED HTR RF LOWER ESC/HT HTR/P
    • 0040-22604 KICK PLATE｜ SMIF-ASYST｜ENDURA INTERFACE
    • 0040-22811 FINGER EXTENDED LIFT HOOP 6
    • 0040-31942 CHAMBER BODY｜ ETCH｜ OXIDE｜ SIDE GAS FEED
    • 0040-33171 MNFLD｜ WATER RETURN｜ FCW｜ DPS｜ ASPX｜ 300
    • 0040-33200 BASE｜ AC DISTRIBUTION BOX｜ PRODUCER S
    • 0040-36095 BELLOWS｜HEATER LIFT
    • 0040-37698 COVER｜ GFI CB FOR NESLAB III
    • 0040-00816 LAMP BASE DPS E-DTCU
    • 0040-00914 insulator
    • 0040-01566 ENCLOSURE｜ LCF CONTROL CARD｜ STAND-ALONE
    • 0040-02261 BLADE SHUTTER 8
    • 0040-03149 HANDLE｜ L SHAPE｜ LID ASSY
    • 0040-03508 FEEDTHROUGH UPPER SWLL｜ 300MM
    • 0021-17725 SHUTTER DISK｜ SNNF ESC｜ 200MM SIP TA(N)｜ KACHINA 1100 RA TWAS
    • 0021-18436 COVER RING｜200MM BESC TITANIUM
    • 0021-19597 E-MAX Slit Door
    • 0021-19681 CMP COVER PLATE｜ LIGHTED PROCESS AREA OPTION
    • 0021-20152 CLAMP RING｜ 8
    • 0021-20381 CUP INNER COIL SUPPORT KNURLED VECTRA
    • 0021-21443 SHIM｜ CLAMPING｜ GAMMA CU｜ TITANIUM
    • 0021-21444 SHIELD｜ UPPER｜ GAMMA CU｜ MACHINED
    • 0021-21874 SHIELD｜ RF HEATER TOP｜ 1.574
    • 0021-23329 Shield｜Chamber｜Sip II 200mm
    • 0021-23517 C-CLAMPS｜SACVD
    • 0021-28010 SST SEAL CLAMP (UNIVERSAL)｜ HEAD ASSY｜ PAD CONDITIONER 200MM
    • 0021-35571 PANEL｜ FLOOR｜ BLANK｜ FRONT｜ POS C/D
    • 0021-36726 INSULATOR｜BULKHEAD｜CATHODE WATER｜DPS
    • 0021-36727 COVER｜BULKHEAD｜CATHODE WATER｜DPS
    • 0021-36743 CHAMBER｜LOWER｜DPS POLY
    • 0021-38008 HOUSING TC AMP 300MM
    • 0021-41126 GAS DISTRIBUTION PLATE｜ 37 HOLES
    • 0021-70210 DEPOSITION RING｜8
    • 0021-70375 COVER 6
    • 0021-77920 MOUNTING PLATE
    • 0021-78170 GASKET
    • 0030-20020 COVER SOURCE 13
    • 0021-04836 BRACKET｜ MOUNTING｜ LCF CARDCAGE
    • 0021-06952 PERF PLATE｜ 200MM SINERGY
    • 0021-08352 THEMAL CHOKE2
    • 0021-09097 PLATE｜ LINER ALIGNMENT｜ VESPEL
    • 0021-09718 LINER｜SLIT VALVE
    • 0021-11938 RING HEATER ASP-300M
    • 0021-13222 PLATE｜ BRACKET MTG｜ DISK DRIVE
    • 0021-13430 LINER CATHODE｜ SCREEN｜ NON-COOLED｜ 300MM
    • 0021-14255 COVER｜ LEADSCREW｜ LIFT
    • 0021-15555 DEPOSITION RING｜8
    • 0020-76390 ENCLOSURE｜ AC｜ CENTURA CHAMBER FAC
    • 0020-76580 G12 DUMMY TARGET FOR 6
    • 0020-76599 PANEL-RIGHT MAIN AC FRAME｜ SEMI-S2
    • 0020-98635 WINDOW｜ SHIPPING｜ LAMP HOUSING｜ ATM CHAMBER
    • 0021-01569 BLOCKER PLATE｜HE/N2 GIGA FILL SACVD
    • 0021-01572 BPSG FACEPLATE GIGA FILL SACVD
    • 0021-02155 RING｜ LOWER｜ ISOLATOR
    • 0021-02156 RING｜ MIDDLE｜ ISOLATOR
    • 0020-25476 HUB INSULATOR HEATER ESC/HT HEATER
    • 0020-27135 SPACER｜ ACTUATOR SHUTTER LINKAGE
    • 0020-27205 CLAMP RING 8
    • 0020-27207 CLAMP RING 6
    • 0020-28622 ROBOT BLADE 8
    • 0020-28649 SHIELD MIDDLE K3/P4 TI/TIN SST
    • 0020-28650 SHIELD LOWER 8 ADV 101 K3/P4 SST
    • 0020-28715 PIN｜ RESTRAINT｜ HTESC
    • 0020-29015 CLAMP RING. 8
    • 0020-29343 SHIELD CLAMP｜ DARKSPACE .727
    • 0020-30628 RING｜ CLAMP｜ VESPEL｜ POLY/WSI｜ 200MM｜ NO
    • 0020-31164 RING｜FOCUSING｜ ALUM｜150 MM｜ PRSP 3
    • 0020-31488 GAS DISTRIBUTION PLATE｜13 HOLES
    • 0020-31627 FLANGE｜BASE｜ ESC
    • 0020-33165 RING ADAPTER
    • 0020-37947 PALLET｜GAS BOX｜ 5200 CENTURA
    • 0020-38058 Cylinder｜ lifter
    • 0020-38328 COVER｜HOL .125/150MM LIF
    • 0020-39837 BRACKET｜SUPPORT ENDPOINT
    • 0020-40706 Rear cover
    • 0020-41748 LLA OUTER SAFETY COVER｜ CENTURA AP LID H
    • 0020-42052 HINGE｜UPPER｜ WXZ
    • 0020-46639 HANDLE｜ RND .50 DIA｜ OFFSET｜ 4
    • 0020-70583 DOOR｜ LOADLOCK ALUMINUM
    • 0020-70772 Buss Bar 400A｜ Right Load Main Contactor
    • 0020-75364 CAP BAFFLE SCREEN｜ SST
    • 0020-75735 WATER MANIFOLD 3 METAL BLADE HDP-CVD
    • 0020-76383 Intlk｜ trip bracket｜ Ext PCII
    • 0020-18427 BLOCK｜GRAPHITE｜GND SHLD｜HDP-CVD
    • 0020-18686 FIXTURE ｜MEMBRANE｜ 300MM TITAN PROFILER
    • 0020-18789 BLANK-OFF GATE-VALVE BON
    • 0020-18799 Bracket｜ Right Dual Gas Spring
    • 0020-20135 BUSS BAR GND/NEU/RF GEN CAB
    • 0020-20407 COVER｜ BOX｜ CIRCUIT BREAKER
    • 0020-20588 COVER RF GEN PCB
    • 0020-20993 PANEL-TOP
    • 0020-21231 COVER｜ CONN
    • 0020-21708 CHUCK 8
    • 0020-22510 CLAMP RING AL/TI 8 SNNP REDUCED EDGE
    • 0020-22548 Plate blankoff shutter arm
    • 0020-22975 INSULATOR TIN 8
    • 0020-23754 RF MATCH INTLK BRACKET PRECLEAN 2
    • 0020-23760 INTERLOCK BRACKET PC 2 RF MATCH
    • 0020-23951 Blade 8
    • 0020-24410 BRACKET INTERLOCK CATHODE LIFT
    • 0020-24804 COVER RING SST 8
    • 0010-25258 OUTSOURCE SRD MODULE WITHOUT LAMP 200MM CMP
    • 0010-26966 ETCH SLIT V/V ACTUATOR
    • 0010-27119 ASSY SHUTTER ENCLOSURE W/ SENSOR MODS
    • 0010-28722 Vectra IMP Match｜ 2MHZ Revision 3.1 300MM
    • 0010-29107 IDLER ASSY｜ BRUSH BOX｜ DESICA CLEANER
    • 0010-30143 Assy｜ Harness Channel｜ Right DPS
    • 0010-31163 CARTRIDGE ASSY｜ H.O.T. ANALYZER｜ 440.5NM
    • 0010-31985 ASSEMBLY｜ DC BIAS
    • 0010-36152 ASSY｜ DOME BLANKOFF｜ SHIPPING PALTE｜ DPS
    • 0010-36408 ASSY｜ RF MATCH｜ DPS CHAMBER
    • 0010-37266 ASSY｜P-CHUCK｜200MM｜THICK CABLE W/GRND TC
    • 0010-37971 DOOR ASSY CORR.RESIST. SLT VLV W/CHEMRAZ
    • 0010-38515 ASSY｜ HEATER LIFT｜NITRIDE550｜OPTIMA & CENTURA
    • 0010-39852 ASSY｜CATHODE CERAMIC ESC｜SUPER-E
    • 0010-40873 PNEUMATIC CONTROLLER ASSEMBLY 0.1MPA｜ 20
    • 0010-41442 ASSEMBLY｜ CYLINDER RODLESS｜ WBLL
    • 0010-70441 ASSY｜ BASIC MOTORIZED LIFT
    • 0010-76149 ASSEMBLY｜ 6
    • 0010-76600 BLADE ASSY 8 THIN METAL BUFFER
    • 0010-76625 FLUORESCENT LIGHT ASSEMBLY
    • 0020-04142 LEXAN RIM｜ 200 MM OXIDE
    • 0020-04150 BUSHING｜WATER BOX
    • 0020-05327 BRACKET
    • 0020-06231 COVER｜CATHODE HEX｜125MM ALUM
    • 0020-13579 SHAFT｜ WIDE BODY INDEXER32*600
    • 0010-04465 ASSY HEATER｜ JMF HPTXZ 8inch
    • 0010-04976 ASSY SUSC 200MM T2 BSE
    • 0010-05254 ASSEMBLY｜ HEATER｜ 8
    • 0010-05692 ASSY HEATER｜ JMF HPTXZ 8inch
    • 0010-08086 ASSY｜ CONFIGURABLE I/O｜ 10 IN/ 10 OUT｜ IRRA 00MM
    • 0010-08185 ASSY ORIENTER LASER OPTIC
    • 0010-09416 RF MATCH ETCH
    • 0010-09737 ASSY SUS 150MM 6MM SHADOW RING BWCVD
    • 0010-10304 HP MOTOR｜ ROBOT
    • 0010-10973 ASSEMBLY｜ H.O.T. DETECTOR MODULE
    • 0010-11382 Assembly｜outer bi-fold door｜Centura
    • 0010-11925 MAGNET ASSY
    • 0010-11997 ASSY HTR TXZ 200MM
    • 0010-12516 SLT-ESC｜ 8inch SSNF
    • 0010-12667 ASSEMBLY｜ CATHODE BASIC｜ 200MM EMAXCT
    • 0010-12844 SIDE MAGNET ASSY｜ HALF｜ 4X1｜FLUX SHAPE｜ 200MM SIP ENCORE CU
    • 0010-12864 MAGNET｜ SIP-ENCORE CU｜ LP-8.8｜ 8inch
    • 0010-12892 pass throw cass Ass`y3 SLOT
    • 0010-13120 NB LL ASSY
    • 0010-13126 HEATER｜8inch B101
    • 0010-13143 ASSY｜ UNIVERSAL WBLL CASSETTE PLATFORM 316SST｜ CMF
    • 0010-13235 HTESC MOTION HP LIFT ASSY
    • 0010-13242 ASSEMBLY｜ EXTENDED REACH WRIST
    • 0010-13272 ASSY｜ HP UPGRADE ROBOT DRIVER UPPER/LOWER
    • 0010-13439 MCA 2 TC AMP BOX
    • 0010-13786 Assy Door HARD ANODIZE 300mm
    • 0010-14493 ASSY｜ LH｜ PIVOT AND BEARING｜ 300MM ROBOT WRIST
    • 0010-15287 CVD SLIT V/V ACTUATOR
    • 0010-17914 Clean cup assembly
    • 0010-23726 ASSY WAFER LIFT PIN 200MM DPS CERAMIC ESC
    • 0010-01296 ASSEMBLY｜PVD LIFTER ORIENTER GIMBAL
    • 0010-01388 ESC CONTROL BOX
    • 0010-01456 MCA E-chuck｜ 8
    • 0010-01711 ASSY｜ HP｜ UPGRADE ROBOT｜ ENDURA
    • 0010-01712 ASSY｜ OUTER MAGNETS AND TUBE｜ HP ROBOT｜ ENDURA
    • 0010-01922 BLASTED ELECTRODE AC BOX ASSY
    • 0010-01927 HEATER ASSY｜ WELD 8inch SNNF BESC BIASED ELECTRODE
    • 0010-02258 ASSY HALOGEN LAMP｜ LOW TEMP ESC
    • 0010-02260 CVD GAS BOX
    • 0010-02372 HIGH EFFICIENCY RF MATCH BRAS
    • 0010-02562 MAGNET｜ SIP
    • 0010-02854 COVER TOP SHIPPING
    • 0010-02977 ASSEMBLY｜RF MATCH｜ SUB ZERO BESC
    • 0010-03244 ASSY｜ PURGE HEATER HP TXZ 200MM
    • 0010-03254 HTESC｜ 8inch MCA+
    • 0010-03363 MCA+ ESC WAFER DETECT ASSY
    • 0010-03704 BEZEL ASSY
    • 0010-04065 MAGNET｜ SIP-TTN｜ REV2｜ 8inch
    • 0010-00344 PEDESTAL ASSY｜125MM AL
    • 0010-00387 Pedestal sub assy:125mm w/elastomer
    • 0010-00865 BAKEOUT LAMP CLAMP ASSEMBLY
    • 0010-00957 ASSY｜ ORIENTER LASER OPTICS
    • 0010-01152 ASSY｜PNEUMATIC｜ AIR CYLINDER
    • 0010-01198 MAGNET｜ AL｜ ALPS+｜ 8inch
    • 0010-01231 MAGNET｜ ALPS-TI｜ LP – 5.1｜ 8inch

  • USED

    • 0010-03667 Rev002 Pivot
    • BE01468F GRAPHITE｜ BACK PARA(BE01468F)
    • 3620-01389 CPRSR HIGH PERF MODEL 9600 LOW VLTGE 200-230VAC
    • 1410-00306 Heater jacket｜ Lower Bypass｜ Zone 4｜ Chamber A/B/C｜ 5｜ 200MM Producer
    • 1410-00643 HEATER JACKET｜ PLIS USG｜ ZONE 5｜ 6｜ SACVD PRODUCER SE
    • 0200-39289 ISOLATOR TEOS PUMPING RING｜ PRODUCER 200
    • 0200-39361 ISOLATOR SILANE PUMPING RING PRODUCER
    • 0270-02667 LID COVER RING
    • 0200-35525 SUSC｜TOS｜R3 ROTATION｜200MM｜EPI
    • 0200-36006 LINER｜SIDE LARGE SINGLE PLATE 300MM ASP
    • 0200-36649 PLATE｜ FINGER LIFT RING｜ 200MM PRODUCER
    • 0200-00762 Liner Lower ASP-300MM
    • 0200-00957 Cylinder｜ Wafer Support｜ SI Coated｜ 200MM RTP｜ Quartz
    • 0200-00968 ISOLATOR｜ FSG-TEOS｜ PRODUCER 200MM
    • 0200-00969 PUMPING LINER｜ FSG-TEOS｜ PRODUCER 200MM
    • 0200-01762 CAPTURE RING
    • 0200-01769 INSULTER BASE 300mm ASPX
    • 0200-03404 EC｜ TOP LINER｜ HARP｜ SACVD 200MM PRODUCER
    • 0200-04084 Ceramic liner｜bottom｜APF 200mm Producer
    • 0200-04085 CERAMIC LINER｜ MIDDLE｜ APF 200MM PRODUCER
    • 0200-09974 SHIELD｜ L-SUPPORT｜ PUMPING PLATE
    • 0190-36514 MANIFOLD｜ HEAT EXCHANGER｜ PRODUCER
    • 0190-70100 POWER SUPPLY (LF-10A)
    • 0200-00117 RING｜ SINGLE｜ 195MM NOTCH｜ NO FLAT｜ HT-D
    • 0200-00317 ISOLATOR PUMPING RING BOTTOM 200MM PRODUCER
    • 0200-00464 LIFT RING｜ PIN｜ 300MM PRODUCER
    • 0200-00557 RING PURGE 300MM WXZ FC SHALLOW
    • 0150-35837 C/ASSY｜80IN RS232｜RTP
    • 0150-36622 CBL｜ HARD DISK PWR｜ PROD X
    • 0150-38560 CABLE ASSY｜ 50′ RS232 OZONE DELIVERY｜ PRODUCER
    • 0150-39233 CABLE ASSY 50 FT REMOTE EMO PRODUCER
    • 0150-97157 CABLE ASSY｜ LFC ADAPTER｜ GPLIS2｜ PRODUC
    • 0150-97520 CBL｜ CH-SET EV MANIFOLD｜ PROD S
    • 0150-97521 CABLE｜ COM COMP EV MANIFOLD｜ PROD S
    • 0150-97525 CABLE｜ GAS PANEL EV MANIFOLD｜ MODULE C｜ PROD S
    • 0150-97529 CABLE｜ FRONT EMO｜ PRODUCER S
    • 0150-97531 CBL ASSY GPLIS DELIVERY LINE HEATER｜ PROD S
    • 0150-97547 CABLE ASSY｜ CHAMBER HEATER 1｜ PRODUCER S
    • 0150-97553 CABLE ASSY RPS2 INTERFACE｜ PRODUCER S
    • 0190-00218 MOTOR STEP 120VAC 5PH W/CABLE LL PRODUCER
    • 0190-01168 T/C ASSY｜ PRODUCER｜ CONSOLIDATED HEATER
    • 0150-11378 CABLE ASSY.｜ MOTION CONTROLLER RS-232｜ PRODUCER
    • 0150-00427 CABLE ASSY｜ COAX｜ LF TYPE C CONN. PRODUC
    • 0150-00462 CABLE｜ASSY｜ FLOPPY DRIVE POWER PRODUCER
    • 0150-00623 CABLE ASSY｜RF RACK INTEGRATED SYS｜RTP CH
    • 0150-00778 CABLE ASSY HEAT EXCHANGER 50 FT PRODUCER
    • 0150-00779 CABLE ASSY HEAT EXCHANGER 75 FT PRODUCER
    • 0150-01268 CABLE ASSY｜ OPERATOR INTERFACE EVC M/M｜ 15 FT
    • 0150-02349 CABLE｜ GND IPX PUMP｜ PRODUCER
    • 0150-02353 C/A NULL MODEM 40FT RTC｜ RTP
    • 0150-04078 CABLE ASSY PRODUCER HEAT EXCHANGER 15KOH
    • 0150-04412 GAS PANEL CH B SERIPLEX MEI PROD
    • 0150-04729 CABLE｜ PRODUCER ETHERNET ROUTER 12V POWE
    • 0150-04996 CABLE ASSY｜ SPLIT FRAME PRODUCER S｜ FRONT END SIGNALS
    • 0140-05350 CHMBR B HARNESS ASSY｜ AC DIST｜ PRODUCER
    • 0140-09463 HARNESS｜ NDIR TO CHAMBER HARNESS｜ PROD S
    • 0140-13377 HARNESS ASSY｜ LCF INTERFACE｜ PRODUCER
    • 0140-01525 HARNESS ASSY｜ COMMON H2O FLOW/AIR SWITCH｜ PROD S
    • 0140-01533 HARN ASSY｜ G-PLIS｜ SPILL｜ CH-B｜ PRODUCER
    • 0140-01553 HARNESS ASSY｜ COMMON CHAMBER PRODUCER S
    • 0140-01554 HARN ASSY｜ LEFT SIDE CH｜ PRODUCER S
    • 0140-01555 HARN ASSY｜ RIGHT SIDE CH｜ PRODUCER S
    • 0140-01571 HARNESS ASSY｜ UNDERTEMP SWITCH｜ TEOS LINE｜ PRODUCER S
    • 0140-02726 HARNESS ASSY｜ LF RF CONTROL｜ PRODUCER S
    • 0140-03880 HARNESS ASSY｜ CH A｜ HTR DRIVER W/ISO XFRMR｜ PRODUCER S
    • 0140-03881 HARNESS ASSY｜ CH B｜ HTR DRIVER W/ISO XFRMR｜ PRODUC
    • 0140-03882 HARNESS ASSY｜ CH C｜ HTR DRIVER W/ISO XFRMR｜ PRODUCER S
    • 0140-04078 HARNESS ASSY｜ INTLK CNT MODULE｜ CH B｜ PROD S｜ SPLI
    • 0100-35175 PCB｜ ASSY RTP CHAMBER INTERFACE
    • 0140-00528 HARNESS ASSY｜COMMON CHAMBER PRODUCER
    • 0140-00921 H/A GAS PANEL DISPLAY POWER｜ RTP CMF
    • 0140-01177 HARNESS ASSY｜ CH. A FACIL FLOW SW ADAPTER｜ PROD
    • 0140-01178 HARNESS ASSY｜ CH. B FACIL FLOW SW ADAPTER｜ PROD
    • 0090-00763 ASSY｜ CHMBR LIFT RF FILTER｜ 200MM PRODUCER
    • 0090-00765 ASSY｜ RF FILTER｜ 200MM PRODUCER
    • 0090-01726 BOX-DISTRIBUTION;0090-01726
    • 0090-02346 RF FILTER｜ 200MM PRODUCER
    • 0090-03200 ASSY｜ BASIC WATLOW｜ NEW(OEM&2ND) PCB｜ PRODUCER SE
    • 0090-36335 ASSEMBLY｜ALARM-LIGHT TOWER｜BRACKET｜RTP
    • 0100-00244 PCB ASSEMBLY PRODUCER WAFER SLIDE DETECT
    • 0100-01293 SAFETY INTERLOCK｜ GAS PANEL｜ PRODUCER SE
    • 0050-51789 HOSE ASSY｜ LONG｜ RF-GEN SUPPLY｜ PRODUCER
    • 0050-51790 HOSE ASSY｜ LONG｜ RF-GEN RETURN｜ PRODUCER
    • 0050-52305 ADAPTER FORELINE｜ 200MM PRODUCER
    • 0050-84434 WELDMENT｜ 5RA CH A/B｜ TEOS｜ UPER 1｜ PROD S SPLIT FRAME
    • 0090-00323 GAS PANEL ASSY｜ SERIPLEX CHAMBER SET B｜ PRODUCER
    • 0050-27584 HOSE ASSY｜ FACILITY WATER RETURN CH. C1｜ PROD
    • 0050-44694 WLDMNT｜ COMMON｜ X POS TO MAIN PRODUCER S
    • 0050-45063 WLDMNT SEG 6 COMMON PROD SPLIT
    • 0050-45073 WLDMNT N2P-NF3 SEG 8 PROD SPLIT
    • 0050-45078 WLDMNT X15 AR SEG 8 PROD SPLIT
    • 0050-45103 WLDMNT X5 N2 SEG 1 PROD SPLIT
    • 0050-45253 WLDMNT X16 NF3 SEG 8 PROD SPLIT
    • 0040-81665 LIFT PIN NAIL HEAD PRODUCER ETCH
    • 0040-87737 COVER｜ HIGH RES. HTR. LVLR.｜ SACVD PRODU
    • 0040-40489 BRACKET｜ REAR LAMP TOWER｜ PROD S SPLIT F
    • 0040-41824 ADAPTER｜ FORELINE｜ 200MM PRODUCER
    • 0040-42496 SHIM CLAMP RIGHT PRODUCER
    • 0040-42497 SHIM CLAMP LEFT PRODUCER
    • 0040-46370 CHUCK 300MM ESC
    • 0040-53927 GAS BOX CHAMBER LID 200MM PRODUCER
    • 0040-53932 BODY 200MM CHAMBER PRODUCER
    • 0040-60846 LID RIGHT ALUM LOADLOCK PRODUCER
    • 0040-61326 FORELINE｜ PUMP｜ PRODUCER
    • 0040-62374 SMIF SHIPPING BRACKET｜ FRONT END｜ 200MM PRODUCER
    • 0040-38576 PLATE｜ BLANKOFF INTERFACE PRODUCER
    • 0040-38661 WELDMENT｜ HEATER COOLING HUB｜ PRODUCER
    • 0040-39064 SUPPORT CENTER RPS2 LID 200MM PRODUCER
    • 0040-39755 FORELINE HORIZONTAL PRODUCER 200MM
    • 0040-39756 FORELINE｜ VERTICAL PRODUCER 200MM
    • 0040-39977 BODY 200MM CHAMBER PRODUCER
    • 0040-03987 SHIM CLAMP LEFT PRODUCER
    • 0040-04807 2.0 X 2.0 LEG｜UPPER FRAME MODULE｜EPI 300MM
    • 0040-04893 BRACKET｜ EV MANIFOLD｜ PRODUCER
    • 0040-04969 MAIN PALLET GAS PANEL PRODUCER S
    • 0040-04999
    • 0040-05013 BRKT DOOR SENSOR GAS PNL/SLD ENCL PROD S
    • 0040-05155 PANEL LOWER LEFT 200MM MAN/TO FE PRODUCER
    • 0040-05311 BRACKET CDA HOUSING PROD S
    • 0040-18158 RING｜ SYM GAS DIST｜ ULTIMA HDP-CVD
    • 0040-32773 PALLET｜ SIDE｜ PROD S｜ SPLIT FRAME
    • 0040-34511 DRIP TRAY｜ GPLIS｜ PROD S｜ SPLIT
    • 0040-34573 COVER｜ EXHAUST DUCT｜ PROD S｜ SPLIT FRAME
    • 0040-38032 BRACKET MAIN SUPPORT PRODUCER
    • 0040-01558 BRACKET｜ CLAMP SUPPORT｜ FORELINE｜ PRODUCER
    • 0040-01618 MANIFOLD｜ INPUT｜ 200MM PRODUCER
    • 0040-01859 FORELINE｜REAR FACILITIES｜CH.B & C｜ PRODUCER 200MM
    • 0040-02071 FORELINE MANIFOLD｜ LOADLOCK｜ PRODUCER
    • 0040-03986 SHIM CLAMP RIGHT PRODUCER
    • 0021-18668 BRACKET｜ TOP COVER SUPPORT｜ GAS PANEL｜ PROD S｜ SPL
    • 0021-35922 CHAMBER BODY｜ TXZ MCVD
    • 0021-39642 BRACKET｜ PRODUCER
    • 0021-45468 PRODUCER PILOT GUIDE 1(LEFT/RIGHT) 200MM
    • 0021-77092 MOUNT-DRIVE MOTOR
    • 0030-00267 BEZEL｜ TTW MONITOR｜ GUI｜PRODUCER
    • 0021-02963 PLATE MOUNTING SENSOR PRODUCER
    • 0021-03637 FACEPLATE｜ SILANE PRODUCER 200MM
    • 0021-03642 SUPPORT ASTRON 200MM SACVD PRODUCER
    • 0021-03882 BRACKET FORELINE SUPPORT｜ PRODUCER
    • 0021-07314 BRACKET｜ LOWER｜ WATER MANIFOLD｜ PRODUCER
    • 0021-08290 BAR SIDE PALLET MTG SPCR GAS PNL PROD S
    • 0021-08809 SKIN｜ VME MOUNTING｜ PRODUCER S
    • 0021-11113 TERMINAL GUARD｜ RTP LAMP PEDESTAL｜ CMF
    • 0021-14208 PUMPING PLATE 200MM POLYGEN
    • 0020-AS001 ASP GDP CERAMIC
    • 0021-01813 FACEPLATE｜ TEOS｜ PRODUCER｜ 200MM
    • 0021-01918 BRACKET｜ LOCKOUT VALVE｜ GP 300MM PRODUCER
    • 0021-02292 BLANKOFF｜ BOTTTOM EXHAUST COVER｜ PRODUCE
    • 0021-02674 PANEL｜LLC｜LOWER｜SMIF F.E.｜200MM PRODUCER
    • 0020-25717 PLATE
    • 0020-24531 ADAPTOR｜ SHIELD G12 SST
    • 0010-37326 ASSY｜MCE SEC. AC RACK｜ CH. B-D
    • 0010-77240 SLURRY B UNIT
    • 0020-05864 BRACKET｜ MTG｜ RP LINES｜ CH A OR D｜ RTP｜ CMF
    • 0020-05866 BRACKET｜ MTG｜ RP LINES｜ CH B OR C｜ RTP｜
    • 0020-08436 BRACKET｜ MOUNTING｜ ACDIST CONDUIT｜ PROD
    • 0010-04503 DOOR ASSEMBLY｜ 300MM SWLL
    • 0010-09035 ASSY BWCVD THROTTLE VALVE 100｜ REWORK
    • 0010-10327 CHUCK-ESC MXPT-OXIDE
    • 0010-11228 ASSY｜ MAGNET｜ LP-3.7.3 300MM
    • 0010-17961 200MM PLASMA CELL ASSY｜ END PT DET｜ PRODUCER
    • 0010-20048 ASSY PWR SUPL/ELECTRONICS END GEN RACK
    • 0010-01286 200mm MCA Heater
    • 0010-01418 OUTSOURCED ASSY｜ HEATER LIFT｜ PRODUCER

Sensor

  • Ozone Sensor API-452

    • API-452

  • Ozone Sensor gFFOZ

    • 3030-06231

Valve

  • DPA REACTOR ASSEMBLY

    • 0090-36276 FOR AMAT CVD
    • 0090-36275 FOR AMAT CVD

  • GATE VALVE

    • 3870-02881 AMAT 3870-02881 W 10inch gate valve

  • HDP 200MM TURBO THROTTLE VALVE

    • DH0190-01699 MOTOR TYPE: PK243A2A-SG36

  • HDP 300MM TURBO THROTTLE VALVE

    • 0010-08452 MOTOR TYPE: ASM46AK-T20
    • 0010-12457 MOTOR TYPE: ASM46AK-T20
    • 0010-29980 MOTOR TYPE: PK243A2A-SG36
    • 0010-29980 MOTOR TYPE: ASM46AK-T20
    • 0010-33875 MOTOR TYPE: ASM46AK-T20
    • DH0010-04235 MOTOR TYPE: PK243A2A-SG36
    • DH0010-29780 MOTOR TYPE: ASM46AK-T20

  • LIFT ARM ASSEMBLY

    • 0010-09340 AMAT P5001 CVD Wafer / Susceptor Lift Assembly
    • 0010-10033 AMAT P5000 CVD Wafer / Susceptor Lift Assembly
    • 0010-20753 AMAT Endura Wafer Lift
    • 0010-70271 AMAT ENDURA Heater Lift ( A101 )
    • 0100-13774 AMAT Wafer Lift

  • SLIT VALVE

    • 0010-13368 AMAT ENDURA 300mm Slit Valve
    • 0010-13369 AMAT ENDURA 300mm Slit Valve
    • 0010-13970 AMAT ENDURA 300mm Slit Valve
    • 0010-14018 AMAT ENDURA 300mm Slit Valve
    • 0010-15287 AMAT ENDURA 200mm Slit Valve
    • 0010-20021 AMAT ENDURA 200mm Slit Valve
    • 0010-20664 AMAT ENDURA 200mm Slit Valve
    • 0010-26966 AMAT ENDURA 200mm Slit Valve
    • 0010-34370 AMAT ENDURA 300mm Slit Valve
    • 0010-35105 AMAT 300mm Slit Valve (CH)
    • 0010-70411 AMAT ENDURA 200mm Slit Valve
    • 0010-75035 AMAT ENDURA 200mm Slit Valve
    • 0010-75172 AMAT ENDURA 200mm Slit Valve
    • 0010-76392 AMAT ENDURA 200mm Slit Valve
    • 0010-76428 AMAT ENDURA 200mm Slit Valve
    • 0010-76482 AMAT ENDURA 200mm Slit Valve
    • 0020-20345 AMAT ENDURA 200mm Slit Valve
    • 0040-50505 AMAT 300mm Slit Valve (L/L)
    • 0040-75862 AMAT Producer-II 200mm Slit Valve
    • 3020-01052 AMAT ENDURA 200mm Slit Valve
    • AMAT P5000 Chamber Slit Valve
    • 0010-01360 AMAT ENDURA 200mm Slit Valve
    • 0010-01365 AMAT ENDURA 200mm Slit Valve
    • 0010-03051 AMAT ENDURA 300mm Slit Valve
    • 0010-06002 AMAT ENDURA 300mm Slit Valve

  • THROTTLE VALVE

    • 0010-04711 AMAT MCVD
    • 0010-09035 WxZ Throttle Valve
    • 0010-09119 Etcher Butterfly Valve
    • 0010-09402 P5000 PECVD
    • 0010-10009 DRIVE｜ HRTV ASSY
    • 0010-10778 SACVD
    • 0010-14682 200mm UPS 0010-09713 (SACVD)
    • 0010-15321-004 eMAX 300mm Throttle Valve
    • 0010-17151 300mm MCVD
    • 0010-30135 DPS Metal Throttle
    • 0010-36743-001 300mm Throttle Valve
    • 0010-37163 DPS TV
    • 0010-39645 DPS Poly Throttle
    • 0010-76174 P5000 SACVD
    • 0015-09077 MXP Butterfly Valve
    • 0040-09032 WxZ Throttle Valve
    • N/A Centura eMAX Etch Throttle Valve
    • N/A DxZ Throttle Valve
    • 0010-02142 P5000/5200 SACVD
    • 0010-03070 MCVD 300mm Throttle Valve

로봇

  • Centura VHP Robot

    • 0242-81833
    • 0040-03664

  • Producer VHP Robot

    • 0010-23249

  • VHP ROBOT(300mm NON-PLT Water)

    • 0010-31899

  • VHP+ ROBOT

    • 0010-70650

  • VHP-E ROBOT

    • 0010-31766

  • VHPe Robot

    • 0010-19040

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