ALN/Al203 Heater

• Pedestal heater

  • 02-146672-00
  • 02-264308-00
  • 02-264309-00
  • 02-355935-00
  • 02-355937-00
  • 02-364187-00
  • 02-373416-00
  • 02-033920-00
  • 02-033134-01
  • 02-033134-00
  • 02-292391-00
  • 02-282384-00
  • 02-033134-02

Dome

• Speed Dome

  • 02-10387-00/01
  • 02-307391-00
  • 02-307446-00
  • 02-293756-00
  • 02-042566-00/01
  • 02-336407-00
  • 02-374705-00
  • 02-282127-00

Equipement Parts

• 02-00093-00 ASSY｜ ONE-ARM ROBOT
• 16-144643-00 Novellus Pedestal Lifter｜300MM
• 19-100586-00 Novellus Bellow｜ Pedestal Cylinder｜300MM
• 16-128855-00 Novellus Bellow｜ Argon Dump｜300MM
• 60-680027-00 Novellus ISO Valve (MDC)｜200MM/300MM
• 27-00082-00
• 27-00117-00

ESC

• SPEED ESC 200mm Novellus Speed HDP ESC

  • 15-121119-00
  • 15-124447-05
  • 02-134264-00
  • 05-134264-00
  • 02-121096-00
  • 02-121642-00
  • 02-134263-00
  • 02-267095-00
  • 05-134263-00
  • 15-028190-00
  • 15-118976-00

Heater Block

• HBLK, 150MM

  • 19-00155-00

• HBLK, 150MM, 3 BALL

  • 19-027010-00

• HBLK, 150MM, SLOT

  • 19-00155-01
  • 19-00154-01

• HBLK, 150MM, SLOT, 4 HOLE

  • 19-032015-02

• HBLK, 150MM, SLOT, 8 POCKET

  • 19-07547-01

• HBLK, 200MM

  • 19-00154-00

• HBLK, 200MM, 18 HOLE, SLD SPRT, EXT BAKE

  • 16-131278-00N

• HBLK, 200MM, 24 HOLE

  • 19-024227-00/19-00154-02

• HBLK, 200MM, 4 HOLE

  • 19-024227-02/19-00154-04

• HBLK, 200MM, EXT BAKE

  • 19-00154-00N

• HBLK, 200MM, SLOT, 20 HOLE

  • 19-024227-01/19-00154-03

• HBLK, 200MM, SLOT, 28 HOLE

  • 19-032015-01

• HBLK, 200MM, SLOT, 4 HOLE, SCRIBED

  • 02-335438-00/19-00154-09

• HBLK, 200MM, SPL HTR

  • 02-258799-00/19-00154-00

• HBLK, 200MM, SPL HTR, 4 HOLE

  • 02-265577-00

Motor Driver

• SERVO MOTOR

  • RAMPV12154

Spindle

• 02-312753-00
• 02-317274-00
• 27-278697-00
• 02-400832-00
• 02-397379-00
• 02-276537-00
• 02-110772-00
• 02-106507-00
• 02-269293-00
• 19-251714-00
• 02-252432-00
• 02-312735-00
• 02-324753-00
• 02-370104-00
• 02-232432-00
• 02-159137-00

ロボット

• Indexer Controller CDP2407-2

  • 27-050014-02